This paper presents a high-accuracy multifunction chip (MFC) with amplitude and phase control in X-band. The MFC is designed with a common leg structure and incorporates a 6-bit attenuator (ATT), a 6-bit phase shifter (PS), two gain compensation amplifiers (GCAs), three single pole double throw switches (SPDTs), and fourteen logic control circuits. However, cascading these blocks causes the change of the terminal impedances of the ATT and PS, which is detrimental to the accuracy. To solve this problem, the extra tunable interstage matching networks (IMNs) are introduced between each ATT and PS cell to alleviate the terminal impedance changes. The compensation capacitances are also applied to ATT to reduce the insertion phase shift. The receive and transmit modes switching is achieved by using four SPDTs. In addition, the resistance feedback is used in GCAs to compensate for passive losses and provide gain to the MFC. To validate the design scheme, the proposed MFC is fabricated in 0.15-m GaAs pseudomorphic high-electronmobility transistor (pHEMT) process. The measured results show that the MFC has excellent accuracy due to the introduction of IMNs. In the range of 8-11 GHz, the measured maximum root-mean-square (RMS) amplitude error of the MFC is less than 0.28 dB, and the maximum RMS phase error is less than 3.3°. Moreover, the MFC is achieved with a compact layout of 4.3 mm × 2.85 mm. Excellent performance and compact size make the MFC greatly potential in spaceborne phased array applications.