A low actuation voltage electrostatic actuator for RF MEMS switch applications

Chu, Cheng Hung; Shih, Wen‐Pin; Chung, S.-Y.; Tsai, Hui-Ping; Shing, Tai-Kang; Chang, Pei‐Zen

doi:10.1088/0960-1317/17/8/031

Cited by 80 publications

(39 citation statements)

References 25 publications

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“…This is one of the reasons why work is underway with the aim of reducing the actuation voltage requirements for new devices [21,[44][45][46][47] and designing optimised actuation waveforms [59][60][61][62] for minimal dielectric charging.…”

Section: High Voltages or Currentsmentioning

confidence: 99%

Integrated Magnetic MEMS Relays: Status of the Technology

2014

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Abstract:The development and application of magnetic technologies employing microfabricated magnetic structures for the production of switching components has generated enormous interest in the scientific and industrial communities over the last decade. Magnetic actuation offers many benefits when compared to other schemes for microelectromechanical systems (MEMS), including the generation of forces that have higher magnitude and longer range. Magnetic actuation can be achieved using different excitation sources, which create challenges related to the integration with other technologies, such as CMOS (Complementary Metal Oxide Semiconductor), and the requirement to reduce power consumption. Novel designs and technologies are therefore sought to enable the use of magnetic switching architectures in integrated MEMS devices, without incurring excessive energy consumption. This article reviews the status of magnetic MEMS technology and presents devices recently developed by various research groups, with key focuses on integrability and effective power management, in addition to the ability to integrate the technology with other microelectronic fabrication processes.

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Section: High Voltages or Currentsmentioning

confidence: 99%

Integrated Magnetic MEMS Relays: Status of the Technology

2014

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“…Balaraman et al [7] fabricated a low cost and actuation voltage RF micro switch using copper. Taking advantage of residual stress to induce buckling and bending, Chu et al [8] designed a high-isolation and low actuation voltage RF micro switch. Khater et al [9] demonstrated 60 % voltage reduction by changing the actuation mode from static to dynamic pull-in.…”

Section: Introductionmentioning

confidence: 99%

Analysis of new actuation methods for capacitive shunt micro switchs

et al. 2016

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Abstract. This work investigates the use of new actuation methods in capacitive shunt micro switches. We formulate the coupled electromechanical problem by taking into account the fringing effects and nonlinearities due to mid-plane stretching. Static analysis is undertaken using the Differential Quadrature Method (DQM) to obtain the pull in voltage which is verified by means of the Finite Element Method (FEM). Based on Galerkin approximation, a single degree of freedom dynamic model is developed and limit-cycle solutions are calculated using the Finite Difference Method (FDM). In addition to the harmonic waveform signal, we apply novel actuation waveform signals to simulate the frequency-response. We show that, biased signals, using a square wave signal reduces significantly the pull-in voltage compared to the triangular and harmonic signal . Finally, these results are validated experimentally.

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“…The S shape has also been used for a novel micromechanical optical switch [19] and a microvalve [20,21]. Some RF switches have beam structures that offer the same advantage [22]. The S shape makes the gap between electrodes small at the edge, and the electrostatic force works effectively at the edge.…”

Section: Introductionmentioning

confidence: 99%

Driving Voltage Reduction of a Micromechanical Optical Switch Driven by Electrostatic Force Using an S-Shaped Deformable Thin-Film Mirror

Sato

2013

JAMDSM

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This paper describes the driving voltage reduction of an optical switch that has an S-shaped deformable thin-film mirror driven by an electrostatic force. The prototype optical switch has high-dielectric-constant layers made from Ta 2 O 5 for a low applied voltage to generate a sufficiently large attractive force. Although the dielectric layers are effective at increasing the attractive force, they often cause a charging problem. Thus, suitable driving procedures for solving the charging problem were experimentally examined. In the two driving procedures, AC or DC voltage inputs were used. The experimental results indicate that the driving procedures are effective at reducing the driving voltage to 30 V. However, the results also show that the AC components induce a residual vibration of the spot position. Consequently, the driving procedure with the DC voltage input is proven to be more suitable.

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A low actuation voltage electrostatic actuator for RF MEMS switch applications

Cited by 80 publications

References 25 publications

Integrated Magnetic MEMS Relays: Status of the Technology

Integrated Magnetic MEMS Relays: Status of the Technology

Analysis of new actuation methods for capacitive shunt micro switchs

Driving Voltage Reduction of a Micromechanical Optical Switch Driven by Electrostatic Force Using an S-Shaped Deformable Thin-Film Mirror

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