A material system for high precision embedded polymer resistor

Su, Jun-wei

doi:10.1109/isapm.2004.1287992

Cited by 3 publications

(3 citation statements)

References 4 publications

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“…The accuracy and fast factors in MEMS piezo-resistive cantilever development are important. The basic resistance of a rectangular shaped section of poly-resistor film is given by Equation 1, where ρ is resistivity of poly-silicon sheet (Su, 2004).…”

Section: Methodsmentioning

confidence: 99%

“…Thus, heat is generated and leads to the photo-thermal process. The unique characteristic of the Excimer laser with 248nm optical wavelength is that it provides high resolution (~1 um) features on the target surface, while the etching process on a silicon substrate at a power of 15mJ will create 0.1um to 2um average depth into the sample (Su, 2004). The piezo-resistor resistant value is dependent on the shapes which constructed by laser automation.…”

Section: Methodsmentioning

confidence: 99%

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Fabrication of a cost-effective MEMS-based piezoresistive cantilever sensor for gait movement analysis

Mahayudin

Saadon

Wahab

et al. 2016

MoHE

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Gait analysis measurement is a method to access and identify gait events and the measurements of motion parameters involving the lower part of body. This significant method is widely used in rehabilitation, sports as well as health diagnostic towards improving the quality of life. However, it is not routine practice due to costs involved in creating and using gait labs. Alternatively, inertial sensors such as micro cantilever accelerometer can be used in the development of cheap and wearable gait analysis systems. Human stride segmentation measurement based on micro-accelerometer cantilever is used in the study of the lower limb movement patterns that include walk, jump and run; and the measurements of the motion parameters. A complete system consists of a fabricated sensor, a Wheatstone bridge circuit and a signal amplifier tailored for real-time stride analysis measurement is proposed. The novel fabrication method of an accelerometer sensor using laser micromachining is introduced in order to develop a simple way in realizing the sensor formation. This study allows us to optimize the requirements of hard-mask and fabrication process steps by reduction of 30% and 25% respectively. In the general framework, this research activity is focused towards development of piezoresistive cantilever formation using laser micromachining for fast fabrication development for real life gait and stride segmentation measurement application.

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Section: Methodsmentioning

confidence: 99%

Section: Methodsmentioning

confidence: 99%

Fabrication of a cost-effective MEMS-based piezoresistive cantilever sensor for gait movement analysis

Mahayudin

Saadon

Wahab

et al. 2016

MoHE

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show abstract

“…There is still a high interest in using screen printed polymer thick film (PTF) resistors, [1] - [4]. There is a large area of applications for these devices, like strain sensors [5], piezo-resistive sensors [6], micro-heaters [7], micro-fluidic devices [8], and chemo-resistors [9], to name only a few.…”

Section: Introductionmentioning

confidence: 99%

Ageing behavior of printed flexible resistors by thermal, mechanical and electrical stresses

Bonfert

Hemmetzberger

Klink

et al. 2012

2012 4th Electronic System-Integration Technology Conference

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Many applications in organic and printed electronic circuits require the implementation of resistors. For this it is essential to identify potential resistive materials, the processes and methods to structure them, but also to analyze their resistive properties on flexible substrates. One of the most important issues of resistors properties is the long-term stability under thermal, mechanical and electrical stresses. These are the main factors that have a major contribution on the drift of the resistor value. Especially for flexible components mechanical influences, like bending, are a new important issue for reliability, which is mostly unknown from rigid substrates. With highly isolating flexible substrates the devices become also susceptible to electrical stresses. We analyzed a polymer resistive material, manufactured in a reel-to-reel screen printing technology on plastic films. The stability of the resistive properties was investigated by different reliability tes ts, like temperature storage, temperature cycling, temperature-humidity stress, mechanical bending and electrical stress. The measurements show that the thick film flexible, carbon based polymer resistors are mostly influenced by humidity and temperature. Bending shows a surprising low influence on the investigated materials. All investigated resistors are susceptible to high energy pulses

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A High-Dimming-Ratio LED Driver for LCD Backlights

Hsieh

Liu

et al. 2012

IEEE Trans. Power Electron.

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A material system for high precision embedded polymer resistor

Cited by 3 publications

References 4 publications

Fabrication of a cost-effective MEMS-based piezoresistive cantilever sensor for gait movement analysis

Fabrication of a cost-effective MEMS-based piezoresistive cantilever sensor for gait movement analysis

Ageing behavior of printed flexible resistors by thermal, mechanical and electrical stresses

A High-Dimming-Ratio LED Driver for LCD Backlights

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