A micro electromagnetic actuator with high force density

Wang, Yue; Zhi, Chao; Tang, Bin; Yang, Kai; Xie, Jin; Xu, Wei; Li, He; Wang, Xi

doi:10.1016/j.sna.2021.112771

Cited by 17 publications

(8 citation statements)

References 25 publications

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“…Coil and FM materials are mixed together and embedded in the bottom plate, forming double layer multi-turn shape as shown in the enlarged view of figure 1. Detail information of the chessboard pattern PM and coil can be found in [26].…”

Section: Device Configurationmentioning

confidence: 99%

“…This means 1.5 A only generates 60 mN in reality, which is around 40% of that simulation value. Difference between simulation and experiment may originate from misalignment between PM and coils, which has been discussed in detail in [26] and [27]. Time dependence of displacement characterization upon current input is recorded by laser displacement sensor and is demonstrated in figure 8.…”

Section: Resetting Characterization By Currentmentioning

confidence: 99%

“…In this paper, we propose a bi-stable electromagnetic mechanism which utilizes chessboard patterned PM and Cu-Ni integrated micro coil. The configuration of PM and the micro coil is realized by recently developed process in our group [26], which shows high force density. One should note that although previously reported PM and coil are core parts of this mechanism, they are not whole design work.…”

Section: Introductionmentioning

confidence: 99%

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A bi-stable mechanism actuated by patterned permanent magnet and Cu-Ni integrated micro-coil

Wang¹,

Xie²,

Zhang³

et al. 2022

J. Micromech. Microeng.

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This paper presents a bi-stable mechanism, which mainly consists of a suspended mass, a spacer and a bottom plate. Electromagnetic actuation is used for switching between two states (i.e. "On/Off" state). The actuation is achieved via permanent magnet on the suspended mass and micro-coils embedded in the bottom plate. Different from spiral coil and central core in conventional design, micro-coils in this paper integrate Cu and Ni together as a whole, acting as both coil and ferromagnetic core. This integration simplifies the fabrication into one-mask process. Furthermore, chessboard patterned permanent magnet is utilized with Cu-Ni integrated micro-coils to generate enhanced force density. The bi-stable mechanism is designed, fabricated and experimentally characterized. Total size of this mechanism is 16×14×2mm3. No power is needed for holding either of the state. Switching processes (both "On" to "Off" and "Off" to "On") can be realized with external acceleration of 24G (gravity) and 37G, respectively. Furthermore, resetting (i.e. "On" to "Off") can also be accomplished with 1.5A current input.

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Section: Device Configurationmentioning

confidence: 99%

Section: Resetting Characterization By Currentmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

A bi-stable mechanism actuated by patterned permanent magnet and Cu-Ni integrated micro-coil

Wang¹,

Xie²,

Zhang³

et al. 2022

J. Micromech. Microeng.

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show abstract

“…Zhi, et al 17 proposed several types of planar micro-electromagnetic actuator that could produce an electromagnetic force density of 0.32 mN/A/mm 3 . Wang, et al 18 proposed a planar-type micro-electromagnetic actuator to achieve a higher electromagnetic force density (0.96 mN/A/ mm 3 ). Muralidharan, et al 19 proposed Shape Memory Alloy (SMA) bimorph actuator, which can be driven under load of 30 mg, 45 mg and 60 mg. unlike MEMS mechanical switches, MEMS solid-state switches have no movable parts.…”

Section: Abbreviationmentioning

confidence: 99%

Research on A Novel Reliable MEMS Bistable Solid State Switch

Lou

Feng

et al. 2022

Def. Sc. J.

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As a result of the unpredictable nature of extreme environments (including temperature, humidity, impact, and other factors), micro-electro-mechanical systems (MEMS) solid-state fuze control modules have an urgent requirement for a MEMS solid-state switch (MEMS-S3). In particular, this switch must remain stable without any energy input after a state transition (i.e., it must be bistable). In this paper, a MEMS bistable solid-state switch (MEMS-bS3) is designed that is based on the concept of producing a micro-explosion. The reliable state switching of the MEMS-bS3 is studied via heat conduction theory and verified via both simulations and experimental methods. The experimental results show that these switches can produce micro-explosions driven by 33 V/47 μF pulse energy. However, the metal film bridge (MFB) structures used in this switch with smaller dimensions (80×20 μm2, 90×30 μm2, and 100×40 μm2) could not enable the switch to realize a reliable state transition, and the state transition rate was less than 40%. When the MFB dimensions reached 120×60 μm2 or 130×70 μm2, the state transition rate exceeded 80%, and the response time was on the μs-scale.

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“…[1][2][3] With the development of integration technology and film technology, NdFeB thick films have potential applications in magnetic sensors and microelectromechanical systems (MEMS). [4][5][6][7][8] However, for NdFeB thick films, the key magnetic properties such as coercivity, remanent magnetization, and perpendicular magnetic anisotropy (PMA) decrease gradually with the growth of thickness after the thickness reaches a certain level. 9 It is important to improve the magnetic properties of NdFeB thick films.…”

Section: Introductionmentioning

confidence: 99%