A micromechanical relay with a thermally-driven mercury micro-drop

Simon, J.; Saffer, S.; Kim, C.-J.

doi:10.1109/memsys.1996.494035

Cited by 24 publications

(13 citation statements)

References 7 publications

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“…Impressive previous work has been done using electrostatic [2], [3], [5], [6], magnetic [4], fluid flow [7], and thermal actuation [8], but none meet all three of our requirements.…”

mentioning

confidence: 99%

Lateral MEMS microcontact considerations

Kruglick

Pister

1999

J. Microelectromech. Syst.

101

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“…Impressive previous work has been done using electrostatic [2], [3], [5], [6], magnetic [4], fluid flow [7], and thermal actuation [8], but none meet all three of our requirements.…”

mentioning

confidence: 99%

Lateral MEMS microcontact considerations

Kruglick

Pister

1999

J. Microelectromech. Syst.

101

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“…3) has recently been reported [2]. The device consists of a hulk-etched throat connecting two reservoirs with suspended heaters.…”

Section: Example 1: Microrelay Fabricationmentioning

confidence: 99%

“…Operation of the relay has been first demonstrated using temporary sealing with a glass cover pressing on the wafer in [2]. however, the device tended to leak, and a more reliable and permanent sealing method was eventually obtained when wicking channels were added [3].…”

Section: Example 1: Microrelay Fabricationmentioning

confidence: 99%

Microgasketing and adhesive wicking techniques for fabrication of microfluidic devices

Kim

1998

SPIE Proceedings

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Microgasketing procedure, developed for MEMS fluidic device fabrication, is described. Planarprocessed microdevices of a volume even less than 1 ni can be selectively filled with liquid and sealed at room temperature in a batch fashion. Isolating a liquid within such a small device area by the gasketing and minimizing air traps during sealing by controlled wicking are the key issues addressed. Two unique microdevices made possible by the described technique are presented: 1) a microrelay switched by a liquidmetal droplet (10 im in diameter), and 2) a highly efficient (e.g., power consumption < 10 iW with driving potential < 10 V) liquid micromotor driven by surface tension force.

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“…Mercury can be used in electromechanical relays to improve lifetimes by reducing the contact wear and arcing effects. A thermally driven microrelay with mercury contacts has been demonstrated [10]. This device had contact resistance lower than 1 , with a maximum carry current of 20 mA.…”

Section: Introductionmentioning

confidence: 99%

Fully integrated magnetically actuated micromachined relays

Taylor

Brand

Allen

1998

J. Microelectromech. Syst.

135

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A fully integrated magnetically actuated micromachined relay has been successfully fabricated and tested. This particular device uses a single-layer coil to actuate a movable upper magnetically responsive platform. The minimum current for actuation was 180 mA, resulting in an actuation power of 33 mW. Devices have been tested which can make and break 1.2 A of current through the relay contacts when the relay is electromagnetically switched. Operational lifetimes in excess of 850 000 operations have been observed. Contact resistances as low as 22.4 m have been observed under electromagnetic actuation. Magnetic and structural finite-element (FE) simulations have been performed using ANSYS to calculate both the actuation and contact forces. [288]

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A micromechanical relay with a thermally-driven mercury micro-drop

Cited by 24 publications

References 7 publications

Lateral MEMS microcontact considerations

Lateral MEMS microcontact considerations

Microgasketing and adhesive wicking techniques for fabrication of microfluidic devices

Fully integrated magnetically actuated micromachined relays

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