A miniature Fabry-Perot interferometer with a corrugated silicon diaphragm support

Spectral Performance of a Micromachined Infrared Spectrum Analyzer in Silicon

“…Gratings and Fabry-Perot optical resonance cavities have been applied successfully as dispersion elements in a microspectrometer [7]- [12]. Also, the fabrication of arrays of thermoelectric detectors has been demonstrated.…”

Medical apps in need of optical microspectrometers

“…This issue has resulted in a preference for filter/resonatorbased devices in microspectrometer research, despite the potential for higher optical throughput of the grating-based spectrometer, because the wavelength selective part can be positions directly on top of the detector. The first successful microspectrometer was the MEMS-based Fabry-Perot (FP) etalons for use in channel switching in fiber communication (Jerman et al 1991). The convenient fact that silicon is transparent in the intended spectral range (1550 nm) was exploited.…”

MEMS-based optical mini- and microspectrometers for the visible and infrared spectral range

“…The simplest realization of the Fabry-Perot-based microspectrometer uses bulk micromachining on two wafers with subsequent wafer-to-wafer bonding [29][30][31][32][33][34][35]. Figure 11 shows the basic device structure.…”

“…property r, and F D denotes the defect finesse depending on system defects such as limited parallelism [34,35]. Multiple location servo control of cavity spacing based on capacitive displacement sensing and electrostatic actuation has been applied to optimize parallelism [41]; however, F eff in micromachined silicon devices is typically limited to…”

“…This technique prevents a reduced optical performance that results from the curvature of a simple suspended membrane with a mirror surface, at the expense of a higher voltage required for yielding a certain deflection at the same membrane area. Beam suspension [32] and corrugations [35] are also used for this purpose. A fabricated microspectrometer is shown in figure 12.…”