A miniaturized SAW-PIRANI sensor

Nicolay, Pascal; Elmazria, O.; Perois, X.

doi:10.1109/ultsym.2012.0385

Cited by 5 publications

(2 citation statements)

References 5 publications

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“…Besides, SAW devices can be easily wirelessly operated [2]. Several wireless SAW-Pirani sensors are presented in the literature, such as [3][4][5]. In [6], a GaN membrane SAW sensor that measures simultaneously the pressure and the temperature with the same SAW structure operating as a dual sensor is demonstrated.…”

Section: Introductionmentioning

confidence: 99%

Characterization of a Wireless Vacuum Sensor Prototype Based on the SAW-Pirani Principle

et al. 2020

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A prototype of a wireless vacuum microsensor combining the Pirani principle and surface acoustic waves (SAW) with extended range and sensitivity was designed, modelled, manufactured and characterised under different conditions. The main components of the prototype are a sensing SAW chip, a heating coil and an interrogation antenna. All the components were assembled on a 15 mm × 11 mm × 3 mm printed circuit board (PCB). The behaviour of the PCB was characterised under ambient conditions and in vacuum. The quality of the SAW interrogation signal, the frequency shift and the received current of the coil were measured for different configurations. Pressures between 0.9 and 100,000 Pa were detected with sensitivities between 2.8 GHz/Pa at 0.9 Pa and 1 Hz/Pa close to atmospheric pressure. This experiment allowed us to determine the optimal operating conditions of the sensor and the integration conditions inside a vacuum chamber in addition to obtaining a pressure-dependent signal.

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Section: Introductionmentioning

confidence: 99%

Characterization of a Wireless Vacuum Sensor Prototype Based on the SAW-Pirani Principle

et al. 2020

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“…The sensitivity was proven to be very high, but the response time was poor. Efforts have been made to improve the response time by reducing the sensor's dimensions [ 14 ] or improving the sensor's modus operandi [ 15 , 16 ], but a really efficient and practical solution still remains to be found. It is now clear that the development of a SAW Pirani that would be at the same time very fast ( i.e.…”

Section: Introductionmentioning

confidence: 99%

A Wireless and Passive Low-Pressure Sensor

Nicolay

Lenzhofer

2014

Sensors

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This paper will discuss the results obtained with a first prototype of a completely passive and wireless low pressure sensor. The device is a heat conductivity gauge, based on a wireless and passive SAW temperature sensor. The required heating energy is applied to the sensor using inductive coupling. The prototype was successfully tested in a vacuum chamber. Its equilibrium temperature changed drastically and in a reproducible way when pressure steps were applied. However, the response time was very long. A model is provided to account for the sensor's behavior. It is then used to show that the response time could be strongly improved using basic design improvements. Further possible improvements are discussed.

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