A model to simulate large angle Rutherford backscattering spectra in GEANT4

Lingis, Danielius; Gaspariūnas, Mindaugas; Kovalevskij, Vitalij; Plukis, A.; Remeikis, Vidmantas

doi:10.1016/j.cpc.2021.108187

Cited by 3 publications

(3 citation statements)

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“…One of the main reasons for this is the limitation of the accuracy of the theoretical cross-section. That limitation was previously observed and evaluated with the current RBS model [12]. Moreover, multiple and plural particle scattering processes are known to induce higher intensity in the low-energy region [5].…”

Section: Rbs From Si Samplementioning

confidence: 74%

“…Within each block, the energy loss and energy loss straggling (both nuclear and electronic, refer to Ref. [12] for details) are integrated, utilizing the stopping powers specific to the amorphous material. The width of final energy distribution is determined by taking the square root of the sum of squared detector energy resolution and total energy loss straggling.…”

Section: Methodsmentioning

confidence: 99%

“…However, these tools are either an outdated or a closed source, which limits versatility of these tools in specific cases where specific particle stopping powers or cross-sections are needed to use. An alternative open source backscattering spectra simulation model [12] has been recently developed which allows these drawbacks to be avoided. The model is based on a versatile open source simulation toolkit GEANT4 [13] that is constantly being developed with the addition of new physics processes, reaction cross-sections, stopping power libraries and others.…”

Section: Introductionmentioning

confidence: 99%

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Numerical simulation of proton backscattering spectra in GEANT4 toolkit

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et al. 2024

physics

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Rutherford backscattering spectroscopy (RBS) is a widely used technique for the atomic-scale analysis of sample composition, lattice displacement and impurity profiling. RBS is based on the elastic scattering of incident charged particles by target nuclei and the subsequent detection of scattered particles. The interpretation of RBS spectra, however, poses challenges due to overlapping peaks, corresponding to scattering from different atomic species, and uncertainties from energy loss, scattering geometry and detector response. To address this, an open source simulation model based on the versatile GEANT4 simulation toolkit has been developed. The flexibility of the open source enables users to tailor the model to its specific requirements, such as the use of specific particle stopping powers, cross-sections, and physics processes. This work presents the results of the comparison between the experimental and simulated backscattering spectra in crystalline silicon, silicon carbide and silicon dioxide samples by 1–2.5 MeV energy protons, obtained in random orientation conditions. The results demonstrate the capability of the model to accurately simulate backscattering spectra in both amorphous materials and single crystals. The overall agreement between the simulated and experimental results is highly promising for future development and use in the interpretation and simulation of RBS spectra.

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Section: Rbs From Si Samplementioning

confidence: 74%

Section: Methodsmentioning

confidence: 99%