A Multifunctional Microgripper Capable of Simultaneous Single Cell Manipulation and Associated Ion Sensing

Abstract

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Manipulation of exposure dose parameters to improve production of high aspect ratio structures using SU-8

“…This is a useful phenomenon that not only can be used to fine tune the dimensions of features, but also (given the ability to maintain near vertical sidewall profiles at high exposure doses) has the potential to fabricate pillars or channels with low micron dimensions in a straightforward process from relaxed design rules, though restrictions to the extent of the aspect ratio will apply for very thick layers ( 100 μm) due to optical and solvent development limitations. The authors have recently successfully fabricated devices with dark field dimensions of 10 μm (with an aspect ratio of 1:7) and believe that it is possible to reduce this value further still [11].…”

Manipulation of 10 – 40 μm Diameter Cells Using a Thermally Actuated Microgripper

“…This is done by modifying the protruding gold electrode. The results from preliminary work can be found in [9,10].…”