Manipulation of exposure dose parameters to improve production of high aspect ratio structures using SU-8

Daunton, Rachael; Gallant, Andrew J.; Wood, David

doi:10.1088/0960-1317/22/7/075016

Cited by 12 publications

(12 citation statements)

References 12 publications

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“…For in-depth descriptions of the SU-8 interface for microfluidic applications, we refer the reader to a couple of comprehensive and exhaustive reviews [18,38]. Beyond its use for direct microfluidic device fabrication, SU-8, due to its high mechanical strength and its capabilities to create high aspect ratio structures [39] and complex 3D networks [40], is definitely a material of choice for mold master making. The SU-8 mold has been intensively used for hot-embossing of thermoplastic devices, or as an intermediate system for injection-molding [41].…”

Section: Su-8: An Epoxy-based Materialsmentioning

confidence: 99%

Overview of Materials for Microfluidic Applications

Roy¹,

Pallandre²,

Zribi³

et al. 2016

Advances in Microfluidics - New Applications in Biology, Energy, and Materials Sciences

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For each material dedicated to microfluidic applications, inherent microfabrication and specific physico-chemical properties are key concerns and play a dominating role in further microfluidic operability. From the first generation of inorganic glass, silicon and ceramics microfluidic devices materials, to diversely competitive polymers alternatives such as soft and rigid thermoset and thermoplastics materials, to finally various paper, biodegradable and hydrogel materials; this chapter will review their advantages and drawbacks regarding their microfabrication perspectives at both research and industrial scale. The chapter will also address, the evolution of the materials used for fabricating microfluidic chips, and will discuss the application-oriented pros and cons regarding especially their critical strategies and properties for devices assembly and biocompatibility, as well their potential for downstream biochemical surface modification are presented.

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Section: Su-8: An Epoxy-based Materialsmentioning

confidence: 99%

Overview of Materials for Microfluidic Applications

Roy¹,

Pallandre²,

Zribi³

et al. 2016

Advances in Microfluidics - New Applications in Biology, Energy, and Materials Sciences

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show abstract

“…Device separation is achieved by breaking the silicon wafer along the crystal cleavage planes. The size of the tip opening can be made as small as 10 µm [11], the tip end shape can be modified to suit the application [10] and extra functionality can be placed on the structure, e.g. electrodes to aid in electrochemical analysis [12].…”

Section: Device Fabricationmentioning

confidence: 99%

Modelling and experimental verification of heat dissipation mechanisms in an SU-8 electrothermal microgripper

Solano

Merrell

Gallant

et al. 2014

Microelectronic Engineering

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NOTICE: this is the author's version of a work that was accepted for publication in Microelectronic Engineering. Changes resulting from the publishing process, such as peer review, editing, corrections, structural formatting, and other quality control mechanisms may not be reected in this document. Changes may have been made to this work since it was submitted for publication. A denitive version was subsequently published in Microelectronic Engineering, 124, 25 July 2014, 10.1016/j.mee.2014.06.002. Additional information:Use policyThe full-text may be used and/or reproduced, and given to third parties in any format or medium, without prior permission or charge, for personal research or study, educational, or not-for-prot purposes provided that:• a full bibliographic reference is made to the original source • a link is made to the metadata record in DRO • the full-text is not changed in any way The full-text must not be sold in any format or medium without the formal permission of the copyright holders.Please consult the full DRO policy for further details. Modelling and Experimental Verification of Heat Dissipation Mechanisms in an SU-8 Electrothermal MicrogripperBelen Solano AbstractWithin this work, a microgripper based on a hot-cold arm principle was tested to give a greater understanding of the associated heat dissipation methods. Experiments were conducted in air at atmospheric and sub-atmospheric pressure, and in helium, argon and helium at sub-atmospheric pressure. The change in deflection, when using gases with different thermal conductivities and at varying pressures showed the significance of conduction through the atmosphere. The experimental results were found to verify a theoretical model created previously by this group, and a further model developed independently; both predicted the deflection that a given current would cause.

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“…The exposure dose is proportional to the rate of polymerization of the epoxide rings in SU8 (i.e. cross linking) [8]. So with doses over that sufficient to saturate the layer, the dimensions of the device can be controlled by affecting the kinetics of the cationic polymerization occurring during the curing stage.…”

Section: Fabricationmentioning

confidence: 99%

Manipulation of 10 – 40 μm Diameter Cells Using a Thermally Actuated Microgripper

2012

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The full-text may be used and/or reproduced, and given to third parties in any format or medium, without prior permission or charge, for personal research or study, educational, or not-for-prot purposes provided that:• a full bibliographic reference is made to the original source • a link is made to the metadata record in DRO • the full-text is not changed in any way The full-text must not be sold in any format or medium without the formal permission of the copyright holders.Please consult the full DRO policy for further details. ABSTRACTThis work presents the successful fabrication of a thermally actuated U-shaped microgripper that has been specially designed to enable low voltage operation for bidirectional in plane deflection. The microgripper tips are carefully designed to match the biological species being manipulated, which has been demonstrated by the successful manipulation of 10 -40 µm diameter particles used to simulate biological cells.

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Manipulation of exposure dose parameters to improve production of high aspect ratio structures using SU-8

Cited by 12 publications

References 12 publications

Overview of Materials for Microfluidic Applications

Overview of Materials for Microfluidic Applications

Modelling and experimental verification of heat dissipation mechanisms in an SU-8 electrothermal microgripper

Manipulation of 10 – 40 μm Diameter Cells Using a Thermally Actuated Microgripper

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