A New Reactive Atom Plasma Technology (RAPT) for Precision Machining: the Etching of ULE® Surfaces

Fanara, C.; Shore, Paul; Nicholls, John; Lyford, Nicholas; Kelley, Jude; Carr, Jeff; Sommer, Phil

doi:10.1002/adem.200600028

Cited by 48 publications

(23 citation statements)

References 5 publications

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“…It is a joint development between Cranfield University and a spin-out from LLNL, RAPT Industries. Helios is a rapid plasma beam surface figuring system capable of reducing the final figuring time (and cost) of large-scale ultra-precision optics for fusion, astronomy and lithography applications [74]. These machines are shown in figure 10.…”

Section: Twenty-first-century Ultra-precision Demandsmentioning

confidence: 99%

Ultra-precision: enabling our future

Shore

Morantz

2012

Phil. Trans. R. Soc. A.

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This paper provides a perspective on the development of ultra-precision technologies: What drove their evolution and what do they now promise for the future as we face the consequences of consumption of the Earth’s finite resources? Improved application of measurement is introduced as a major enabler of mass production, and its resultant impact on wealth generation is considered. This paper identifies the ambitions of the defence, automotive and microelectronics sectors as important drivers of improved manufacturing accuracy capability and ever smaller feature creation. It then describes how science fields such as astronomy have presented significant precision engineering challenges, illustrating how these fields of science have achieved unprecedented levels of accuracy, sensitivity and sheer scale. Notwithstanding their importance to science understanding, many science-driven ultra-precision technologies became key enablers for wealth generation and other well-being issues. Specific ultra-precision machine tools important to major astronomy programmes are discussed, as well as the way in which subsequently evolved machine tools made at the beginning of the twenty-first century, now provide much wider benefits.

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Section: Twenty-first-century Ultra-precision Demandsmentioning

confidence: 99%

Ultra-precision: enabling our future

Shore

Morantz

2012

Phil. Trans. R. Soc. A.

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“…Reactive plasma jets driven at atmospheric pressure are widely used for surface treatment like surface activation [1], cleaning [2], sterilization [3], coating [4], and etching [5]. During the past 15 years a reactive plasma jet etching technology (Plasma Jet Machining-PJM), which is mainly dedicated to optical surface precision machining has been developed in Leibniz Institute of surface modification (IOM) [6,7].…”

Section: Introductionmentioning

confidence: 99%

New Process Simulation Procedure for High-Rate Plasma Jet Machining

Meister

Arnold

2010

Plasma Chem Plasma Process

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Surface figuring using chemically reactive plasma jet machining (PJM) is a promising non-conventional technology for deterministic ultra-precision machining of optical components. Based on chemical reactions between plasma generated radicals and the surface atoms this technology is capable to fabricate complex shaped free form surfaces. Since the material removal rate during PJM depends strongly on the surface temperature which itself is influenced by the jet heat flux to the surface, the arising nonlinear effects on the etch result have to be regarded. Conventionally applied dwell time calculation algorithms do not consider those effects leading to significant machining errors in some cases. In order to improve the machining procedure with respect to deterministic material removal yielding predictable results a process simulation model has been developed. This model considers spatio-temporal variations of surface temperature and temperature dependent material removal and is able to predict the final workpiece topography after machining.

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“…The important advantages of zerodur material are zero thermal expansion coefficient in the wide temperature ranging from -40 to +100°C and excellent mechanical properties [1] . Chemically, zerodur consists of oxides Li 2 O-SiO 2 -Al 2 O 3 (SiO 2 ,35 to 75%, Al 2 O 3 ,20 to 50%,Ti,Zr,Li,Mg,P oxides [2] ).It is synthesized at the temperature 700~1000°C.Zerodur serves as the mirror substrate material for largescale telescopes. Currently the world's largest and most powerful telescope has four main mirrors made of zerodur glass ceramic, each with a surface of over 50 square meters and a diameter of 8.2m.…”

Section: Introductionmentioning

confidence: 99%

“…RAPT(Reactive Atomic Plasma Technology) has been developed by RAPT Industries and employed for the finishing of optical surfaces. it has been reported that reactive atom etching at atmospheric pressure using fluorine rich gases may achieve substantial removal rates provided the removed materials is released in volatile fluorinated form [2] .Naturally, the choice of the active species and its concentration depends on the material to be treated and on the desired removal rate. Cranfield University and the University College of London have carried out a joint project using RAPT to finish the large aperture optics for EURO 50 telescope.…”

Section: Introductionmentioning

confidence: 99%

“…Cranfield University and the University College of London have carried out a joint project using RAPT to finish the large aperture optics for EURO 50 telescope. They have also reported their work on the machining of ULE material using RAPT [2] . Zerodur as a multiphase and multi-component material, has never been reported to be processed by chemical active atmospheric pressure plasma .…”

Section: Introductionmentioning

confidence: 99%

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Effect on surface roughness of zerodur material in atmospheric pressure plasma jet processing

2010

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Zerodur material is considered as the ideal material in the high performance optic systems because of its excellent thermal stability characteristics. This paper deals with the impacting factors on the zerodur material surface roughness during atmospheric pressure plasma jet(APPJ) processing. At first, based on multiphase and multi-component in zerodur material, the effect on the zerodur surface chemical components and surface roughness is studied when the element contained Si is etched during the chemical machining process. The change of surface microcosmic topography is observed, it is proved that the technology of atmospheric pressure plasma jet can modify the surface roughness of zerodur material. Moreover, in consideration of the re-deposition phenomenon in the machining process, the composition of the re-deposition are studied and the genesis of the re-deposition were analysed. Scanning Electron Microscopy (SEM) with Energy Dispersive X-ray spectrometry (EDX) were utilized to obtain the elemental composition of the sample powder residuum on zerodur surface. The relationship between substrate roughness and the process parameters is established based on the experimental results. Experimental results indicate that it is beneficial to add certain amount O 2 to modify the surface roughness of zerodur material. This finding provides an important basis for the improvement of surface roughness in APPJ of zerodur material.

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A New Reactive Atom Plasma Technology (RAPT) for Precision Machining: the Etching of ULE® Surfaces

Cited by 48 publications

References 5 publications

Ultra-precision: enabling our future

Ultra-precision: enabling our future

New Process Simulation Procedure for High-Rate Plasma Jet Machining

Effect on surface roughness of zerodur material in atmospheric pressure plasma jet processing

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