A new technique for controlling the dopant concentration in the double-crucible method

Resistivity distribution in bulk growth of silicon single crystals

“…In general, the various methods proposed to avoid macroscopic axial segregation can be classified into two groups. In the first class, the key idea is to ensure that the composition of the liquid in the vicinity of the interface remains constant all through solidification; this can be done using, e.g., the floating crucible [2] or the continuous liquid feeding technique [3][4][5][6]. A second approach consists in adapting the growth conditions to balance the variations in bulk concentration.…”

“…Numerous studies have been reported on the control of axial specific resistivity distributions in bulk crystal growth [1][2][3][4][5][6][7][8][9]. In general, the various methods proposed to avoid macroscopic axial segregation can be classified into two groups.…”

Resistivity distribution of silicon single crystals using codoping

“…In the first class, the key idea is to ensure that the composition of the liquid in the vicinity of the interface remains constant all through solidification; this can be done using, e.g. the floating crucible [3] or the continuous liquid feeding technique [4][5][6][7]. A second approach consists in adapting the growth conditions to balance the variations in bulk concentration.…”

“…Numerous studies have been reported on the control of axial specific resistivity distributions in bulk crystal growth [2][3][4][5][6][7][8][9][10]. In general, the various methods proposed to avoid axial segregation can be classified into two groups.…”

Quality evaluation of resistivity-controlled silicon crystals

“…Numerous studies have been reported to avoid macroscopic axial segregation in bulk crystal growth [1][2][3][4][5][6][7][8][9]. Wang and coworkers [10] have proposed the simple codoping method for controlling the axial specific resistivity distribution in silicon single crystals.…”