A new vacuum friction gauge based on a Si tuning fork

Kurth, Steffen; Hiller, Karla; Mehner, Jan; Dötzel, Wolfram; Geßner, Thomas; Iwert, Thomas; Biehl, Steffen

doi:10.1016/s0924-4247(01)00867-6

Cited by 6 publications

(4 citation statements)

References 8 publications

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“…В общем случае параметры движения кремниевой пластины описываются следующим выражением [4]: Приравниваем амплитудное значение энергии, запасаемой в газовых пружинах при давлении Р, приращению энергии колебательной системы при возрастании измеряемого давления от нуля до Р, при одинаковых амплитудах.…”

Section: материалы и методыunclassified

Resonant vacuum gauge

2020

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Section: материалы и методыunclassified

Resonant vacuum gauge

2020

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“…However, these cannot measure low pressures accurately if the comparison pressure is atmospheric, and attempts to use evacuated cavities to provide a low-pressure comparison have only been marginally successful [176,177]. The friction gauge, which uses damping of a resonator by residual gas as an indicator of pressure, has also had limited acceptance [178,179]. The most common MEMS vacuum gauges are thermopiles and Pirani gauges.…”

Section: Mems Vacuum Gaugesmentioning

confidence: 99%

MEMS mass spectrometers: the next wave of miniaturization

Syms

Wright²

2016

J. Micromech. Microeng.

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This paper reviews mass spectrometers based on micro-electro-mechanical systems (MEMS) technology. The MEMS approach to integration is first briefly described, and the difficulties of miniaturizing mass spectrometers are outlined. MEMS components for ionization and mass filtering are then reviewed, together with additional components for ion detection, vacuum pressure measurement and pumping. Mass spectrometer systems containing MEMS sub-components are then described, applications for miniaturized and portable systems are discussed, and challenges and opportunities are presented.

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“…Additionally, tuning fork-type quartz crystals are also extensively used in many scientific and engineering applications in bio-or liquid detection [1], determination of liquid density [2], measurement of pressure in the vacuum region [3], probing local surface physical or chemical properties in non-contact atomic force microscopy in liquid phases [4], and evaluation of a force sensor at low temperatures and ultrahigh vacuum [5].…”

Section: Introductionmentioning

confidence: 99%

Development of SMD 32.768 kHz tuning fork type crystals

Lee

Moon

Seo

et al. 2007

International Journal of Materials Research

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Taguchi's design of experiment method and statistical F-test were used to further optimize design parameters for as-fabricated resonance frequency of tuning forks for use in Qualcomm â mobile station modem (MSM)-3000 TM series central processing unit chips of code division multiple access, personal communication system, and global system for mobile communication systems. After much trial and error, finite element method modeling and Taguchi's design of experiment method enabled selection of essential design parameters to effectively manufacture tuning fork test samples using photolithography with subsequent photoresist spray coating. As-fabricated resonance frequency values of a tuning fork blank thus manufactured remain almost the same prior to final frequency adjustment of the mounted crystals, regardless of pressure change from ambient to the designated packaging pressure of 6 · 10 -5 Torr. The tuning fork test samples thus fabricated were characterized and analyzed using Taguchi's design of experiment method and statistical F-test to evaluate the sensitivity of as-fabricated resonance frequency for various design parameters fror ambient to the designated packaging pressure of 6 · 10 -5 Torr. As-fabricated resonance frequency is most sensitive to tine width (x) and variance analysis results showed that only x and y (tine length) are significant design parameters and no design parameter significantly affects the as-fabricated resonance frequency change with the vacuum level of the package: the as-fabricated resonance frequency change with vacuum level turned out to be independent of design parameter contributions.

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A new vacuum friction gauge based on a Si tuning fork

Cited by 6 publications

References 8 publications

Resonant vacuum gauge

Resonant vacuum gauge

MEMS mass spectrometers: the next wave of miniaturization

Development of SMD 32.768 kHz tuning fork type crystals

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