2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) 2010
DOI: 10.1109/memsys.2010.5442397
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A novel approach for the fabrication of all-polymer microfluidic devices

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Cited by 4 publications
(4 citation statements)
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“…This method is fast and reliable, but requires a custom device and only allows the bonding of two layers, thus significantly limiting chip design (Chu et al 2015). Using layers of a lower T g polymer, such as TMMF (photosensitive epoxy laminate) for the thermal welding of PMMA, reduces deformation on the PMMA bulk, although the procedure is time-consuming and requires photolithography equipment for the shaping of TMMF (Kalkandjiev et al 2010).…”
Section: Introductionmentioning
confidence: 99%
“…This method is fast and reliable, but requires a custom device and only allows the bonding of two layers, thus significantly limiting chip design (Chu et al 2015). Using layers of a lower T g polymer, such as TMMF (photosensitive epoxy laminate) for the thermal welding of PMMA, reduces deformation on the PMMA bulk, although the procedure is time-consuming and requires photolithography equipment for the shaping of TMMF (Kalkandjiev et al 2010).…”
Section: Introductionmentioning
confidence: 99%
“…The meniscus angle formed on the bottom O 2 -treated FR-4 surface θ B is considered ≈0°, while the CA on the microchannel dry photoresist (DPR) sidewalls θ W was assumed to be 20°, determined from the meniscus images (please see Fig. 4c) and the reported effect of O 2 treatment on DPR (Kalkandjiev et al 2010). Figure 4c verifies the expected fluid formation showing an image of the actual liquid-air meniscus advancing in the microchannel.…”
Section: Resultsmentioning
confidence: 63%
“…For polymer-based microfluidic devices, soft lithography is commonly used, which is based on replica molding for micro-and nanofabrication (Kalkandjiev et al 2010;Kim et al 2008b;Stephan et al 2007). Photolithography is first used to generate the so-called master mold, typically on a silicon wafer.…”
Section: Silicon- Glass-and Polymer-based Microfluidicsmentioning
confidence: 99%