2016
DOI: 10.1038/srep26891
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A novel approach of chemical mechanical polishing for cadmium zinc telluride wafers

Abstract: A novel approach of chemical mechanical polishing (CMP) is developed for cadmium zinc telluride (CdZnTe or CZT) wafers. The approach uses environment-friendly slurry that consists of mainly silica, hydrogen peroxide, and citric acid. This is different from the previously reported slurries that are usually composed of strong acid, alkali, and bromine methanol, and are detrimental to the environment and operators. Surface roughness 0.5 nm and 4.7 nm are achieved for Ra and peak-to-valley (PV) values respectively… Show more

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Cited by 90 publications
(18 citation statements)
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“…However, PI exhibit a poor thermal conductivity in the order of 0.1 W/mK 9 11 , which cannot meet the requirement of fast heat conduction for the advanced electronic devices. The general strategy to improve the thermal transport performance is using thermally conductive fillers such as carbon materials 12 15 , metal or ceramic materials 16 19 are added to the polymer matrix 20 .…”
Section: Introductionmentioning
confidence: 99%
“…However, PI exhibit a poor thermal conductivity in the order of 0.1 W/mK 9 11 , which cannot meet the requirement of fast heat conduction for the advanced electronic devices. The general strategy to improve the thermal transport performance is using thermally conductive fillers such as carbon materials 12 15 , metal or ceramic materials 16 19 are added to the polymer matrix 20 .…”
Section: Introductionmentioning
confidence: 99%
“…The gaseous bubbles in a liquid have been used in broad such as the controlling of protein conformations (Liu et al 2005;Zhou et al 2004;Zhang et al 2013;Okumura and Itoh 2014), the drug delivery studies (Lukianova-Hleb et al 2012;Li et al 2015;Hernandez et al 2017), the direct transfer of large-size graphene films with decreased defects (Gao et al 2014;Guo et al 2018), and the performance of chemical mechanical polishing (Tsai et al 2007;Zhang et al 2016aZhang et al , b, 2018. For example, a sudden formation of nitrogen nanobubbles might induce the unfolding of protein in our body and has been associated with the origin of 'Diver's disease' .…”
Section: Introductionmentioning
confidence: 99%
“…A traditional method is to introduce high contents of thermally conductive fillers, such as metals 611 , ceramic particles 1215 , carbon nanotubes 1620 , or graphene nanoplateles 2125 . In particular, the silicon carbides are provided with excellent properties such as high thermal conductivity, high thermal stability, high breakdown field, excellent mechanical properties and chemical inertness 2632 . Therefore, they can be applied in various circumstances such as in high temperatures, high electron density, high frequency and in harsh environments 33 .…”
Section: Introductionmentioning
confidence: 99%