A novel driving principle by means of the parasitic motion of the microgripper and its preliminary application in the design of the linear actuator

Huang, Hu; Zhao, Hongwei; Yang, Zhaojun; Mi, Jie; Fan, Zunqiang; Wan, Shengpeng; Shi, Changwei; Ma, Zhichao

doi:10.1063/1.4711869

Cited by 60 publications

(43 citation statements)

References 25 publications

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“…Based on the parasitic motion principle, the microgripper is used to modulate the output of the piezoelectric stack instead of directly piezodriven form stick-slip style. With the symmetrical structure, the PMP linear actuator in [14] mainly consisting of two microgrippers and two piezoelectric stacks realizes the large motion range, various velocities, and forward and reverse movements. However, the symmetrical structure also increases dimensions of the PMP linear actuator, and its size reaches 130 mm × 50 mm × 26 mm, which lowers the flexibility of its applications.…”

Section: Introductionmentioning

confidence: 99%

“…But they are usually conflicting. As a modified stick-slip driving principle, the parasitic motion principle (PMP) which has the potential to solve both of these two issues was presented in [14]. Based on the parasitic motion principle, the microgripper is used to modulate the output of the piezoelectric stack instead of directly piezodriven form stick-slip style.…”

Section: Introductionmentioning

confidence: 99%

“…If dimensions of the PMP linear actuator can be reduced but its functions still maintained, applications of the PMP linear actuator will be more flexible. Based on this consideration, we will try to use only one microgripper and one piezoelectric stack to realize similar functions of the PMP linear actuator [14] in this paper. Figure 1 is the model of the linear positioning stage based on the parasitic motion principle.…”

Section: Introductionmentioning

confidence: 99%

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Forward and Reverse Movements of a Linear Positioning Stage Based on the Parasitic Motion Principle

Huang

Zhao

2014

Advances in Mechanical Engineering

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A compact linear positioning stage using one microgripper and one piezoelectric stack is presented based on the parasitic motion principle. Characteristics of the linear positioning stage along the positive y-axis and the negative y-axis are measured and compared with each other. Experimental results indicate that the linear positioning stage has features of the large motion range, various movement velocities and stepping displacement, and forward and reverse movements. Meanwhile, the positioning stage has good resolution and enough load capacity. Possible reasons leading to nonlinearity and velocity difference between forward and reverse movements are discussed. Research results in this paper will make applications of the parasitic motion principle more flexible.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Forward and Reverse Movements of a Linear Positioning Stage Based on the Parasitic Motion Principle

Huang

Zhao

2014

Advances in Mechanical Engineering

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“…Zubir et al 27 developed novel hybrid flexure-based microgrippers for precision micro-object manipulation with an amplification ratio of 3.68 and a maximum jaw traveling range of 100µm. A novel driving principle was presented by Huang et al 28 by means of the parasitic motion of PZT actuated microgrippers. Although these microgrippers show appropriate performance, they are generally used for micro-object manipulation and assembly without considering high speed operations.…”

Section: Introductionmentioning

confidence: 99%

A novel monolithic piezoelectric actuated flexure-mechanism based wire clamp for microelectronic device packaging

Liang

Wang

Tian

et al. 2015

Review of Scientific Instruments

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Placid. (2015) A novel monolithic piezoelectric actuated flexure-mechanism based wire clamp for microelectronic device packaging. Review of Scientific Instruments, 86 (4). 045106. Permanent WRAP url: http://wrap.warwick.ac.uk/76447 Copyright and reuse:The Warwick Research Archive Portal (WRAP) makes this work by researchers of the University of Warwick available open access under the following conditions. Copyright © and all moral rights to the version of the paper presented here belong to the individual author(s) and/or other copyright owners. To the extent reasonable and practicable the material made available in WRAP has been checked for eligibility before being made available.Copies of full items can be used for personal research or study, educational, or not-for profit purposes without prior permission or charge. Provided that the authors, title and full bibliographic details are credited, a hyperlink and/or URL is given for the original metadata page and the content is not changed in any way. Publisher's statement:Copyright ( A note on versions:The version presented here may differ from the published version or, version of record, if you wish to cite this item you are advised to consult the publisher's version. Please see the 'permanent WRAP url' above for details on accessing the published version and note that access may require a subscription.A novel monolithic piezoelectric actuated flexure-mechanism based wire clamp for microelectronic device packaging A novel monolithic piezoelectric actuated wire clamp is presented in this paper to achieve fast, accurate and robust microelectronic device packaging. The wire clamp has compact flexure-based mechanical structure and light weight. To obtain large and robust jaw displacements and ensure parallel jaw grasping, a two-stage amplification composed of a homothetic bridge type mechanism and parallelogram leverage mechanism was designed. Pseudo-rigid-body model (PRBM) and Lagrange approaches were employed to conduct the kinematic, static and dynamic modeling of the wire clamp, and optimization design was carried out. The displacement amplification ratio, maximum allowable stress and natural frequency were calculated. Finite element analysis (FEA) was conducted to evaluate the characteristics of the wire clamp and wire Electro Discharge Machining (EDM) technique was utilized to fabricate the monolithic structure. Experimental tests were carried out to investigate the performance, and the experimental results match well with the theoretical calculation and FEA.The amplification ratio of the clamp is 20.96, and the working mode frequency is 895 Hz.Step response test show the wire clamp has fast response and high accuracy, and the motion resolution is 0.2μm. High speed precision grasping operations of gold and copper wires were realized using the wire clamper.

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“…1,2 In addition, these mechanisms have further advantages such as no friction losses, no need for lubrication, no hysteresis, ease of fabrication, compactness, and suitability for use in small-scale applications. [3][4][5][6] Due to these advantages, coupled with nanometer positioning accuracy, they have been widely used in many industrial applications such as fiber optic coupling, micro-grippers, 7,8 scanning probe microscopy, 9,10 lithography, 11 micro/nano actuators, 12,13 micromachining, and semiconductor production. Compliance is the crucial parameter that represents the relationship between an applied load and the deflection that occurs due to the load.…”

Section: Introductionmentioning

confidence: 99%

Compliance modeling of planar flexure-based mechanisms and its application to micro-motion stages

et al. 2016

International Journal of Advanced Robotic Systems

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This article presents the compliance modeling method of flexure-based mechanisms. The relationship between deformations and loads of the flexure members and the end effector is analyzed according to the zero virtual work principle. Using the matrix method, concise compliance equations for flexure serial and parallel structures are derived in conjunction with consideration of the compliance calculation errors of flexure hinges. Finally, relationships between the output compliances and geometrical parameters of a 3-revolute-revolute-revolute micro-motion stage are discussed. To validate the proposed compliance modeling method, the output compliances calculated by the empirical and theoretical compliance equations are subsequently compared with values derived from finite element analysis (FEA). The comparisons indicate that the results obtained from the empirical compliance equations are in good agreement with those derived from FEA, whereas the errors calculated by the theoretical equations are much larger, which demonstrate the accuracy of the empirical compliance equations and validate the proposed compliance modeling method.

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A novel driving principle by means of the parasitic motion of the microgripper and its preliminary application in the design of the linear actuator

Cited by 60 publications

References 25 publications

Forward and Reverse Movements of a Linear Positioning Stage Based on the Parasitic Motion Principle

Forward and Reverse Movements of a Linear Positioning Stage Based on the Parasitic Motion Principle

A novel monolithic piezoelectric actuated flexure-mechanism based wire clamp for microelectronic device packaging

Compliance modeling of planar flexure-based mechanisms and its application to micro-motion stages

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