A novel pull-up type RF MEMS switch with low actuation voltage

In this brief a new low actuation voltage RF MEMS switch is presented which can be integrated and controlled with available CMOS technologies. Despite the advantages in the design of RF MEMS switches designing a low actuation voltage RF MEMS switch is still a challenging task. To overcome this problem, a small size RF MEMS switch utilizing a moving plate with multiple holes supported by a low spring constant beam is presented in this work. Experimental measurement results indicate pull-in voltage of 0.5 V and lift-off voltage of 0.3 V for 1.5 μm displacement. The measured return loss and insertion loss are better than −20 dB and −0.1 dB respectively for a frequency range extending from 3 kHz to 3GHz. The switching time is less than 0.22 ms when the switch is turned on with a CMOS buffer from TSMC-65 nm technology with 1.00 V supply voltage.

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“…3b. Table 1 presents a comparison between the key features of the designed MEMS switch with reported works in the literature [5,6].…”

Section: Fabrication Processmentioning

confidence: 99%

“…Various design techniques are proposed in the literature to reduce the actuation voltage. In [5] a pull-up type RF MEMS switch with low actuation voltage of 4.5 V is presented. In [6], a mechanically coupled low-voltage electrostatic resistive RF multithrow switch with 15 V is proposed.…”

Section: Introductionmentioning

confidence: 99%

Ultra low actuation voltage RF MEMS switch

Attaran

Rashidzadeh

2015

Micro and Nano Syst Lett

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“…Over the available conventional solid state switching devices like PIN diode and FET, the RF-MEMS switch has numerous potential advantages for switching function and performs better performance including high bandwidth and good linearity [10]. On the other hand, the RF-MEMS switch has also some limitations during designing and operation such as low power handling, switching speed, low switching lifetime, high actuation voltage and electrostatic discharge [11][12][13][14]. To overcome the challenges faced in RF-MEMS switch, many of researchers have designed and analyzed different types of switches in which different techniques and switching parameters are considered like actuation voltage of switch and switching speed of switch.…”

Section: Introductionmentioning

confidence: 99%

Study of RF-MEMS Capacitive Shunt Switch for Microwave Backhaul Applications

Shah¹

2017

IOSR JECE

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“…To achieve a high isolation usually requires a sufficiently large closing gap, which will further increase the driving voltage. In addition, the signal lines and the top plate have to be realized by two separate process steps, which is inconveniently integrated with millimeter wave circuits [6,7].…”

Section: Introductionmentioning

confidence: 99%

Design and Fabrication of a Lateral Contact RF-MEMS Switch for MM-Wave Applications

Zhu¹,

Han²,

Tang³

et al. 2013

KEM

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Design, fabrication and test results of a lateral DC-contact RF-MEMS switch for mm-wave applications are presented. The switch is driven by a triple cascaded electrothermal buckle-beam actuator, which can generate large displacements and contact forces at lower temperatures than traditional electrothermal actuators. The size of the whole switch is only 1.2 mm × 1.4 mm in area. The measured transient times for switch-on and switch-off are 13.6 and 0.96 ms, respectively. Low insertion losses and high isolation of 0.17 dB and 26.7 dB, respectively, are obtained in the proposed switch at center frequency of 35GHz, the insertion losses less than 0.5dB and the isolation better than 22.5dB can be achieved in the proposed switch at 30~40GHz. The reasonable agreement between design and measurement is observed.

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A novel pull-up type RF MEMS switch with low actuation voltage

Cited by 16 publications

References 11 publications

Ultra low actuation voltage RF MEMS switch

Ultra low actuation voltage RF MEMS switch

Study of RF-MEMS Capacitive Shunt Switch for Microwave Backhaul Applications

Design and Fabrication of a Lateral Contact RF-MEMS Switch for MM-Wave Applications

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