A novel test structure for monitoring technological mismatches in DRAM processes

Geib, H.; Weber, W.; Wohlrab, E.; Risch, L.

doi:10.1109/icmts.1992.185929

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A novel test structure for monitoring technological mismatches in DRAM processes

Cited by 4 publications

References 6 publications

Experimental investigation of the minimum signal for reliable operation of DRAM sense amplifiers

Experimental investigation of the minimum signal for reliable operation of DRAM sense amplifiers

Block-decoded sense-amplifier driver for high-speed sensing in DRAM's

Strategy to optimize the development, use, and dimension of test structures to control defect appearance in backend process steps

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