2004
DOI: 10.1109/led.2004.830064
|View full text |Cite
|
Sign up to set email alerts
|

A Partially Insulated Field-Effect Transistor (PiFET) as a Candidate for Scaled Transistors

Abstract: Highly manufacturable partially insulated field-effect transistors (PiFETs) were fabricated by using Si-SiGe epitaxial growth and selective SiGe etch process. Owing to these technologies, pseudo-silicon-on-insulator (SOI) structures, partially insulating oxide (PiOX) under source/drain (PUSD) and PiOX under channel (PUC), could be easily realized with excellent structural and process advantages. We are demonstrating their preliminary characteristics and properties. Especially, in the PUSD PiFET, junction capac… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
4
1

Citation Types

1
11
0

Year Published

2006
2006
2016
2016

Publication Types

Select...
7
1

Relationship

0
8

Authors

Journals

citations
Cited by 30 publications
(12 citation statements)
references
References 11 publications
1
11
0
Order By: Relevance
“…Fortunately, the high-k gate dielectrics can be used to meet the stringent J g,limit for high-performance applications. A PUC process 8) used for forming the SDT structure and the fin pattern formation 9,10) are two key process steps for the SDT FinFET. This paper presents another type of FinFETs, which shows how SDT can be easily added to conventional FinFETs for reducing both SCEs and SHE at the same time for low-cost, high-performance applications at deca-nanoscale regime.…”
Section: Performance Prediction Of Sdt Dg-finfetsmentioning
confidence: 99%
See 2 more Smart Citations
“…Fortunately, the high-k gate dielectrics can be used to meet the stringent J g,limit for high-performance applications. A PUC process 8) used for forming the SDT structure and the fin pattern formation 9,10) are two key process steps for the SDT FinFET. This paper presents another type of FinFETs, which shows how SDT can be easily added to conventional FinFETs for reducing both SCEs and SHE at the same time for low-cost, high-performance applications at deca-nanoscale regime.…”
Section: Performance Prediction Of Sdt Dg-finfetsmentioning
confidence: 99%
“…This paper presents a simple method of fabricating a new source/drain (S/D)-tied (SDT) DG-FinFET through existing techniques [6][7][8][9][10] and applies device simulation to investigate its dc and RF/analog properties comprehensively. Besides the investigation of fin width (W fin ) variation in SDT FinFETs, the body-tied (BT) and silicon-on-insulator (SOI) FinFETs were also designed for performance comparison.…”
Section: Introductionmentioning
confidence: 99%
See 1 more Smart Citation
“…2 shows the proposed process flow for fabricating the novel Pi-OXJLT structure. A similar process flow has also been used in [18], [19][20]. The starting material is silicon with p-type doping (see Fig.…”
Section: Introductionmentioning
confidence: 99%
“…To the best of our knowledge, this is the first time that a circuit analysis for a plasma based device BCPT and the proposed SELBOX-BCPT has been performed. Further, a process flow for the fabrication of the proposed device, employing SiGe removal technique to create the partial buried oxide has also been proposed for fabricating the proposed device [24,27].…”
Section: Introductionmentioning
confidence: 99%