We report on the change of the characteristic times of the random telegraph signal (RTS) in a MOSFET operated under microwave irradiation up to 40 GHz as the microwave field power is raised. The effect is explained by considering the time dependency of the transition probabilities due to a harmonic voltage generated by the microwave field that couples with the wires connecting the MOSFET. From the dc current excited into the MOSFET by the microwave field we determine the corresponding equivalent drain voltage. The RTS experimental data are in agreement with the prediction obtained with the model, making use of the voltage data measured with the independent dc microwave induced current. We conclude that when operating a MOSFET under microwave irradiation, as in single spin resonance detection, one has to pay attention into the effects related to microwave irradiation dependent RTS changes.The Random Telegraph Signal (RTS), observed as a random switching between two states of the channel current in a metal-oxide-semiconductor field effect transistor (MOSFET) [1,2,3,4], has been considered as a possible quantum readout mechanism by Vrijen et al. [5] and has been used for detecting single electron spin resonance.[6] The spin resonance detection requires the irradiation by a microwave field of a defect at the Si/SiO 2 interface of a MOSFET in presence of a static magnetic field. [7,8] The capture λ c and emission λ e rates due to the tunneling of electrons assisted by multiphonon non radiative processes depend on the energy levels of the trap with respect to the Fermi energy of the electron channel.[9] The change in the rates, at the resonance frequency, is due to the microwave-induced transition between the Zeeman energy levels of the trap. The RTS change at the spin resonance is detected by monitoring either the average drain-source current or the emission and capture times as a function of the static magnetic field while irradiating the device with a fixed microwave field. [6] The RTS change in spin resonance condition is detected by monitoring either the average drain-source current, or the emission and capture times as a function of the static magnetic field while irradiating the device with a microwave field. In both cases one should carefully identify proper experimental conditions in order to avoid spurious resonances induced by other traps in the MOS-FET. We have already shown that the average current method is affected by a microwave induced stationary drain-source current. [10] In this letter we demonstrate that also the emission and capture times of the trap may change as a function of the intensity of the microwave field. To this aim, we * Electronic address: marco.fanciulli@mdm.infm.it have systematically characterized a change of the mean emission time τ e and capture time τ c of a trap at the interface between silicon and oxide in n-MOSFETs interacting with a microwave field. The devices are made on a p-well, with channel length of 0.35 µm, width of 0.45 µm, an oxide thickness of 7.6 nm, a threshold v...