This work reports on the development of an optical position sensitive detector (PSD) which exhibits highly linear output characteristics comparable to complex multilayer sensors and which is based on a simple, two-stage fabrication procedure. Further advantages of this device include the potential for large-area surfaces and the production of comparatively large output signals requiring no ampli®cation or external biasing. Most of these studies were carried out on a Schottky barrier (SB) structure based on crystalline p-silicon and electron-beam evaporated titanium and operated under focused white light. As a comparison of output behaviour, a second testing run was carried out using a red laser diode. The devices had metal layer thicknesses ranging from 2000 A Ê to 180 A Ê and results showed that the highest sensitivities and lowest nonlinearities occurred with PSDs having thinner titanium ®lms. The overall best results were obtained using white light in photovoltaic mode, i.e. with no external biasing. Additionally, we compared these titanium devices to electron-beam deposited indium tin oxide (ITO) devices, and found that the ITO series had much lower outputs and higher nonlinearities. These latter devices were considered to be heterojunction structures of n-ITO/p-Si.