A Powerful TCAD System Including Advanced RSM Techniques for Various Engineering Optimization Problems

Abstract

This paper presents the NORMAN/DEBORA TCAD system developed at IMEC to design and optimize sub-micron IC technology using process and device simulators. The versatility of the TCAD system will be shown for two important problems encountered in IC technology design and optimization.

Metamodels for Computer-based Engineering Design: Survey and recommendations

“…NORMAN/DEBORA is a TCAD (Technology Computer Aided Design) system incorporating advanced sequential DOE and RSM techniques to aid in engineering optimization and robust design [117]. NORMAN/DEBORA includes a novel design of experiments concept -Target Oriented Design -a unique parameter transformation technique -RATIOFIND -and a nonlinear, constrained optimizer -DEBORA [117].…”

“…NORMAN/DEBORA includes a novel design of experiments concept -Target Oriented Design -a unique parameter transformation technique -RATIOFIND -and a nonlinear, constrained optimizer -DEBORA [117]. It has been successfully employed for semiconductor integrated circuit design and optimization [117][118][119][120]. An updated and more powerful version of NORMAN/DEBORA is being offered as LMS Optimus [121].…”

Integrated optimization capabilities in the VISTA technology CAD framework

“…For each input parameter, a transformation function can be selected from a set of transformations. This list consists of logarithmic [18], square root, inverse [19], exponential, and other special transformations [20].…”

Simulation of complete VLSI fabrication processes with heterogeneous simulation tools

“…TMA's Work Bench [3] allows to call arbitrary external tools by providing a UNIX-script based interface. The NORMAN system [4] creates response surface models by substituting parameter values in simulator input decks and executing them iteratively. The DoE/Opt framework [5] concerns itself with the design of experiments according to DoE schemes, the generation of response surface models, and with the management of the generated data in a spreadsheet fashion.…”