A quantitative estimation of the sensitivity of field-emission pressure-gauge

The fluctuation of the emission current from carbon nanotube field emitter arrays (CNT FEAs) grown on silicon emitters was investigated as a function of total emission current and ambient pressure. The ratio of amplitude of short-term fluctuation ΔI and average emission current Iave strongly depended on Iave. The relationship ΔI/Iave∝Iave−1/2 was found. This relationship showed that the average emission current Iave is proportional to the number of active carbon nanotube emitters. The effect of vacuum pressure on the emission properties was examined by adjusting the pumping speed of the turbomolecular pump. The emission current at fixed voltage was affected by the adsorption of gas species and amounts.

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A quantitative estimation of the sensitivity of field-emission pressure-gauge

Cited by 2 publications

References 11 publications

An automated device for manufacturing microneedles of iterated shape

An automated device for manufacturing microneedles of iterated shape

Field-emission characteristics from carbon nanotube field emitter arrays grown on silicon emitters

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