Self-propagating exothermic reactions (SPER) provide intense localized heat sufficient for bonding metals or alloys with minimal heat excursion to the components, which shows great potential for the die attach in power electronics packaging. However, the reliability of such formed joints is yet to be fully understood owing to a wide range of defects involved in the instantaneous propagating reaction and heating/cooling. In this work, the finite element analysis is performed to understand the thermal transfer and mechanical responses of materials to the SPER bonding for the die attach of Si device onto direct bonded copper (DBC) substrate with Sn-3.0Ag-0.5Cu solder. The simulation has been validated using the temperature distribution in SPER bonding, which shows a good agreement with the actual measured results. Moreover, a systematic investigation on the mechanical responses due to thermal mismatch reveals their effects on the thermal stress of interfaces and bonding reliability. 1