A self-clocked ASIC interface for MEMS gyroscope with 1m&amp;#x00B0;/s/&amp;#x221A;Hz noise floor

Elsayed, A.; Elshennawy, A.; Elmallah, A.; Shaban, A. M.; George, Benjamin; Elmala, M.; Ismail, A.; Wassal, Amr G.; Sakr, Mostafa; Mokhtar, A.; Hafez, Mahfooz; Hamed, Abbi; Saeed, Mohamed; Samir, M.; Hammad, Mohab N.; Elkhouly, Mohamed; Kamal, Aiman; Rabieah, M.; Elghufaili, A.; Shaibani, Saami J.; Hakami, I.; Alanazi, Turki M.

doi:10.1109/cicc.2011.6055369

Cited by 12 publications

(5 citation statements)

References 4 publications

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“…A novel modulated low-pass EM- gyroscope interface designed by Rombach et al [80] The modulation-stages allowed reducing the sampling frequency to the drive mode resonance frequency. Using a 0.18m high-voltage CMOS process, in 2011 Elsayed et al [81] from Si-Ware Systems (SWS) [82] launched a commercial interface ASIC chip based on the architectures presented by Raman [79] and Petkov [23]. As shown in Fig.…”

Section: A Low-pass Em- Gyroscopesmentioning

confidence: 99%

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Electromechanical Sigma–Delta Modulators (<inline-formula> <tex-math notation="LaTeX">$\Sigma \Delta {\mathrm{ M}}$ </tex-math> </inline-formula>) Force Feedback Interfaces for Capacitive MEMS Inertial Sensors: A Review

Chen

Kraft

2016

IEEE Sensors J.

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Section: A Low-pass Em- Gyroscopesmentioning

confidence: 99%

“…This ASIC chip was fabricated and combined with a MEMS gyroscope in a single Leadless-Chip-Carrier (LCC) package. The gyroscope used mode-matching [83] and achieved a noise floor of 1m°/s /√Hz over a 200Hz bandwidth, a linearity of 0.26% and a FS range of ±400°/s [81].…”

Section: A Low-pass Em- Gyroscopesmentioning

confidence: 99%

Electromechanical Sigma–Delta Modulators (<inline-formula> <tex-math notation="LaTeX">$\Sigma \Delta {\mathrm{ M}}$ </tex-math> </inline-formula>) Force Feedback Interfaces for Capacitive MEMS Inertial Sensors: A Review

Chen

Kraft

2016

IEEE Sensors J.

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“…The main objective of this approach is to use a controller that, through the actuation circuit, applies a force on the sense mode that compensates for the Coriolis one. To this purpose, the well-known electro-mechanical ΣΔ (EM-ΣΔ) architecture has been widely employed [1][2][3][4][5][6]. We can mention three main benefits of this approach.…”

Section: Introductionmentioning

confidence: 99%

“…The effects of the electronic noises are evaluated afterward in [8]. In [7], the authors show that with one additional [4] feedback, the same design flow of the classical ΣΔ modulators can be applied for the EM-ΣΔ feedback, providing a systematic design methodology and ensuring robustness against the relay. Nevertheless, the effects of the all noise sources are not considered for the filter design, and the robust stability is only partially ensured.…”

Section: Introductionmentioning

confidence: 99%

H_∞ Design of an EM-ΣΔ Feedback for MEMS Gyroscopes

Saggin

Korniienko

Papin³

et al. 2020

2020 DGON Inertial Sensors and Systems (ISS)

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HAL is a multi-disciplinary open access archive for the deposit and dissemination of scientific research documents, whether they are published or not. The documents may come from teaching and research institutions in France or abroad, or from public or private research centers. L'archive ouverte pluridisciplinaire HAL, est destinée au dépôt et à la diffusion de documents scientifiques de niveau recherche, publiés ou non, émanant des établissements d'enseignement et de recherche français ou étrangers, des laboratoires publics ou privés.

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“…In response to the accumulated market pressure on the size and cost of gyroscopes, the designers are struggling to improve devices' sensitivity. One approach is to explore the electronics limitation of the ASIC interface, while 1 mdeg/s/ √ Hz has been already reported [11]. Other designers are trying to improve the mechanical sensitivity of the vibrational gyroscope, typically a spring-mass-damping system.…”

Section: Introductionmentioning

confidence: 99%

A novel tri-axis MEMS gyroscope with in-plane tetra-pendulum proof masses and enhanced sensitive springs

Wang

Jiao

Yan

et al. 2014

J. Micromech. Microeng.

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This paper presents a tri-axis MEMS gyroscope design with novel tetra-pendulum proof masses for X-, Y-axis and regular proof masses for Z-axis rate sensing, which are all coupled with and embedded in a conventional tuning fork driving frame. The four pendulum proof masses are suspended via the torsional springs to a common center anchor and can be driven to swing around the anchor via the tilted transforming springs as the driving frame is oscillated in an anti-phase mode. As an X-, Y-axis angular rate is applied, the tetra-pendulum proof masses will rotate around the torsional springs in pairs for X- and Y-axis differential sensing, respectively. In particular, we investigated the relationship between the tilting angle of the transforming spring and its transforming efficiency, i.e. the amplitude ratio of the pendulum's swing to the driving oscillation, which shows a straight impact on the sensitivity. By theoretical analysis and Ansys simulation, we achieved an optimal tilting angle of 22.5°, which extends along the angular bisector of the pendulum's and driving mass’ moving direction and demonstrates a significant increase in transforming efficiency by about 40%, compared with the trivial tilting angle of 45°. By employing an SOI-based bulk micromachining process, the prototype device with the optimal design of the transforming spring (type I) and that with the trivial design (type II) for reference have been successfully fabricated. As expected, the testing results indicate an increase of more than 20% in the X- and Y- sensitivities, which is mainly from the enhanced sensitive transforming springs.

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A self-clocked ASIC interface for MEMS gyroscope with 1m°/s/√Hz noise floor

Cited by 12 publications

References 4 publications

Electromechanical Sigma–Delta Modulators (<inline-formula> <tex-math notation="LaTeX">$\Sigma \Delta {\mathrm{ M}}$ </tex-math> </inline-formula>) Force Feedback Interfaces for Capacitive MEMS Inertial Sensors: A Review

Electromechanical Sigma–Delta Modulators (<inline-formula> <tex-math notation="LaTeX">$\Sigma \Delta {\mathrm{ M}}$ </tex-math> </inline-formula>) Force Feedback Interfaces for Capacitive MEMS Inertial Sensors: A Review

H_∞ Design of an EM-ΣΔ Feedback for MEMS Gyroscopes

A novel tri-axis MEMS gyroscope with in-plane tetra-pendulum proof masses and enhanced sensitive springs

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A self-clocked ASIC interface for MEMS gyroscope with 1m&#x00B0;/s/&#x221A;Hz noise floor

Cited by 12 publications

References 4 publications

Electromechanical Sigma–Delta Modulators (<inline-formula> <tex-math notation="LaTeX">$\Sigma \Delta {\mathrm{ M}}$ </tex-math> </inline-formula>) Force Feedback Interfaces for Capacitive MEMS Inertial Sensors: A Review

Electromechanical Sigma–Delta Modulators (<inline-formula> <tex-math notation="LaTeX">$\Sigma \Delta {\mathrm{ M}}$ </tex-math> </inline-formula>) Force Feedback Interfaces for Capacitive MEMS Inertial Sensors: A Review

H∞ Design of an EM-ΣΔ Feedback for MEMS Gyroscopes

A novel tri-axis MEMS gyroscope with in-plane tetra-pendulum proof masses and enhanced sensitive springs

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Product

Resources

About

A self-clocked ASIC interface for MEMS gyroscope with 1m°/s/√Hz noise floor

H_∞ Design of an EM-ΣΔ Feedback for MEMS Gyroscopes