A novel tri-axis MEMS gyroscope with in-plane tetra-pendulum proof masses and enhanced sensitive springs

Wang, M C; Jiao, Jiwei; Yan, Pengxun; Mi, Bin; Qin, Shuwang

doi:10.1088/0960-1317/24/4/045002

Cited by 6 publications

(5 citation statements)

References 14 publications

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“…Size (mm × mm) Z-Axis Shock Resistance Year SEU [1] 9.80 × 9.80 Unknown 2015 FSL [7] 2.90 × 2.25 Unknown 2017 KEIO [8] 5.00 × 5.00 Unknown 2020 UCAS [9] 3.57 × 3.47 Unknown 2014 UCD [10] 3.20 × 3.20 Unknown 2015…”

Section: Institutionsmentioning

confidence: 99%

Design and Fabrication of a Novel Wheel-Ring Triaxial Gyroscope

Guo

Wei

Cai

et al. 2022

Sensors

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This paper presents a new type of three-axis gyroscope. The gyroscope comprises two independent parts, which are nested to further reduce the structure volume. The capacitive drive was adopted. The motion equation, capacitance design, and spring design of a three-axis gyroscope were introduced, and the corresponding formulas were derived. Furthermore, the X/Y driving frequency of the gyroscope was 5954.8 Hz, the Y-axis detection frequency was 5774.5 Hz, and the X-axis detection frequency was 6030.5 Hz, as determined by the finite element simulation method. The Z-axis driving frequency was 10,728 Hz, and the Z-axis sensing frequency was 10,725 Hz. The MEMS gyroscope’s Z-axis driving mode and the sensing mode’s frequency were slightly mismatched, so the gyroscope demonstrated a larger bandwidth and higher Z-axis mechanical sensitivity. In addition, the structure also has good Z-axis impact resistance. The transient impact simulation of the gyroscope structure showed that the maximum stress of the sensitive structure under the impact of 10,000 g@5 ms was 300.18 Mpa. The gyroscope was produced by etching silicon wafers in DRIE mode to obtain a high aspect ratio structure, tightly connected to the glass substrate by silicon/glass anode bonding technology.

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Section: Institutionsmentioning

confidence: 99%

Design and Fabrication of a Novel Wheel-Ring Triaxial Gyroscope

Guo

Wei

Cai

et al. 2022

Sensors

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“…To date, some successful compliant micromechanism (CMM) designs have been used in many commercial MEMS products. For instance, in compact MEMS multiaxis gyroscopes, the synchronous oscillation of multi proof masses relies on compliant transmission mechanisms [18]. Most of the mechanisms used in MEMS sensors do not require large deflections because they either work in an oscillation mode or have very limited response mechanical motion.…”

Section: Introductionmentioning

confidence: 99%

Micro-scale Realization of Compliant Mechanisms: Manufacturing Processes and Constituent Materials—A Review

Wang

Zhang

et al. 2021

Chin. J. Mech. Eng.

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Compliant micromechanisms (CMMs) acquire mobility from the deflection of elastic members and have been proven to be robust by millions of silicon MEMS devices. However, the limited deflection of silicon impedes the realization of more sophisticated CMMs, which often require larger deflections. Recently, some novel manufacturing processes have emerged but are not well known by the community. In this paper, the realization of CMMs is reviewed, aiming to provide help to mechanical designers to quickly find the proper realization method for their CMM designs. To this end, the literature surveyed was classified and statistically analyzed, and representative processes were summarized individually to reflect the state of the art of CMM manufacturing. Furthermore, the features of each process were collected into tables to facilitate the reference of readers, and the guidelines for process selection were discussed. The review results indicate that, even though the silicon process remains dominant, great progress has been made in the development of polymer-related and composite-related processes, such as micromolding, SU-8 process, laser ablation, 3D printing, and the CNT frameworking. These processes result in constituent materials with a lower Young’s modulus and larger maximum allowable strain than silicon, and therefore allow larger deflection. The geometrical capabilities (e.g., aspect ratio) of the realization methods should also be considered, because different types of CMMs have different requirements. We conclude that the SU-8 process, 3D printing, and carbon nanotube frameworking will play more important roles in the future owing to their excellent comprehensive capabilities.

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“…Improving the mechanical sensitivity of the gyroscope, typically a spring-mass-damping system, is the core aspect for researchers [ 14 ]. Many methods can be taken for reference.…”

Section: Introductionmentioning

confidence: 99%

Coupling Mechanism Analysis and Fabrication of Triaxial Gyroscopes in Monolithic MIMU

Xia

2017

Micromachines

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A novel fully decoupled micro inertial measurement unit (MIMU) is presented in this paper. The proposed MIMU structure, mostly focusing on the gyroscope unit, is highly symmetrical and can be limited to an area of 10,000 μm × 10,000 μm. Both the tri-axis gyroscope and tri-axis accelerometer structures are fabricated on the same single silicon chip, which can differentially detect three axes’ angular velocities and linear accelerated velocities at the same time. By elaborately arranging different decoupling beams, anchors and sensing frames, the drive and sense modes of the tri-axis gyroscope are fully decoupled from each other. Several dynamic models, including decoupling beams with fabrication imperfections, are established for theoretical analysis. The numerical simulation made by MATLAB shows the structural decoupling of three sense modes, and indicates that the key decoupling beams, which affect the quadrature error, can be improved in design. The whole fabrication process, including silicon on glass (SOG) process, dry/wet etching as well as the methods for improving the fabrication quality, is then shown. Experiments for mode frequency and quality factors of four modes (drive, yaw, pitch and roll) have been performed, and are found to be 455 (6950.2 Hz), 66 (7054.4 Hz), 109 (7034.2 Hz) and 107 (7040.5 Hz) respectively. The analysis and experiment both prove that this novel MIMU has the potential value of further intensive investigation.

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A novel tri-axis MEMS gyroscope with in-plane tetra-pendulum proof masses and enhanced sensitive springs

Cited by 6 publications

References 14 publications

Design and Fabrication of a Novel Wheel-Ring Triaxial Gyroscope

Design and Fabrication of a Novel Wheel-Ring Triaxial Gyroscope

Micro-scale Realization of Compliant Mechanisms: Manufacturing Processes and Constituent Materials—A Review

Coupling Mechanism Analysis and Fabrication of Triaxial Gyroscopes in Monolithic MIMU

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