Design and Fabrication of a Novel Wheel-Ring Triaxial Gyroscope

Abstract

This paper presents a new type of three-axis gyroscope. The gyroscope comprises two independent parts, which are nested to further reduce the structure volume. The capacitive drive was adopted. The motion equation, capacitance design, and spring design of a three-axis gyroscope were introduced, and the corresponding formulas were derived. Furthermore, the X/Y driving frequency of the gyroscope was 5954.8 Hz, the Y-axis detection frequency was 5774.5 Hz, and the X-axis detection frequency was 6030.5 Hz, as determined by the finite element simulation method. The Z-axis driving frequency was 10,728 Hz, and the Z-axis sensing frequency was 10,725 Hz. The MEMS gyroscope’s Z-axis driving mode and the sensing mode’s frequency were slightly mismatched, so the gyroscope demonstrated a larger bandwidth and higher Z-axis mechanical sensitivity. In addition, the structure also has good Z-axis impact resistance. The transient impact simulation of the gyroscope structure showed that the maximum stress of the sensitive structure under the impact of 10,000 g@5 ms was 300.18 Mpa. The gyroscope was produced by etching silicon wafers in DRIE mode to obtain a high aspect ratio structure, tightly connected to the glass substrate by silicon/glass anode bonding technology.

Multi-Ring Disk Resonator with Elliptic Spokes for Frequency-Modulated Gyroscope

“…With the exception of the LFM versions, which work under the condition that mode split exists, all FM gyroscopes require a degenerated resonator, in which two axes have the same resonant frequency and quality factor (Q-factor) [ 15 , 16 ]. Until now, lots of structures have been proposed for the degenerated resonator, such as quadruple mass [ 17 , 18 ], dual mass [ 19 , 20 , 21 ], single ring [ 22 , 23 ], hemispherical or dual shell [ 24 , 25 , 26 ], and multi-ring (disk) [ 27 , 28 ] resonators.…”

Analytical modeling of an inclined folded-beam spring used in micromechanical resonator devices

“…Yamane et al [43] analyzed the spring constant of a serpentine beam in the z direction to suspend the high-density proof mass of an accelerometer. Guo et al [44] determined the stiffness of a curve serpentine spring in the form of an S-shape in a three-axis gyroscope.…”

Failure Study of Rubber-Cord Flexible Couplings and their Mounting Bolts

“…To determine the causes of bolt disintegration, check the compliance of the samples with the requirements of ISO 898-1:2013 [2] and EN 10083-3:2007-01 [2] standards for 4Cr41 grade steel. Broken bolt Samples 10,11,;No,12; No.13 which were dismantled from ER2 and ER2T series motor cars were chosen as research objects;, as well as one sample No.14. of a new bolt.…”

“…The purpose of the invention is achieved as follows: the device for controlling the impact and vibration force of bolt fasteners consists of a housing, inside which the following elements are installed: a vibration sensor (4) and an impact sensor (5), a microcontroller (6), a data transmission unit (7) and a power supply unit (8). A piezo-accelerometer can be used as a vibration sensor (4) and shock sensor (5) -sensors that convert the value of vibration or shock force into an electronic signal [12]- [9].…”