Because the dual-mass MEMS gyroscope's output is greatly influenced by temperature, which can lead to errors that cannot be ignored. To solve this problem, a novel compensation method is proposed: a parallel processing algorithm, which integrates the Permutation entropy (PE), Local Characteristic-scale Decomposition (LCD) and Adaptive network-based fuzzy inference system (ANFIS). Firstly, LCD is used to decompose the output which contains temperature noises and drifts into a trend component and several intrinsic scale components (ISC), according to autocorrelation and complexity, three different categories will be obtained by PE: pure noise output, mixed output, and drift output. The different processes are as follows, the noise output is discarded, the mixed output is filtered by SG (Savitzky-Golay filter), then dual ANFIS is applied. Since the drift output completely reflects the temperature characteristics, the degree of non-linearity is high, the ANFIS with complex rules is used for processing. And the mixed output is composed of intermediate layer modes, containing a relatively small amount of temperature characteristics, simple rule ANFIS is adopted for processing. Finally, the signal is reconstructed. After that, the temperature error experiment is carried out, the result shows the method can effectively eliminate the error and compensate for the drift, it has a fast convergence speed and good effect, and has the advantage of good compensation efficiency.

This paper presents a new type of three-axis gyroscope. The gyroscope comprises two independent parts, which are nested to further reduce the structure volume. The capacitive drive was adopted. The motion equation, capacitance design, and spring design of a three-axis gyroscope were introduced, and the corresponding formulas were derived. Furthermore, the X/Y driving frequency of the gyroscope was 5954.8 Hz, the Y-axis detection frequency was 5774.5 Hz, and the X-axis detection frequency was 6030.5 Hz, as determined by the finite element simulation method. The Z-axis driving frequency was 10,728 Hz, and the Z-axis sensing frequency was 10,725 Hz. The MEMS gyroscope’s Z-axis driving mode and the sensing mode’s frequency were slightly mismatched, so the gyroscope demonstrated a larger bandwidth and higher Z-axis mechanical sensitivity. In addition, the structure also has good Z-axis impact resistance. The transient impact simulation of the gyroscope structure showed that the maximum stress of the sensitive structure under the impact of 10,000 g@5 ms was 300.18 Mpa. The gyroscope was produced by etching silicon wafers in DRIE mode to obtain a high aspect ratio structure, tightly connected to the glass substrate by silicon/glass anode bonding technology.

This paper studies a kind of gyro structure of N = 3 Wineglass Mode Metal Cylindrical Resonator Gyroscope (WMMCRG). Compared with traditional Cylindrical Vibrating Gyroscope (CVG), the designed structure has higher scale factor and lower frequency split. This paper provides a more specific processing method and the parameters of resonator materials. A closed-loop controlling system with low error and low noise is designed for WMMCRG. The system is composed of three independent closed-loop systems: drive closed-loop, sensing closed-loop, and quadrature error correction closed-loop. Through the test of the high-precision turntable, under the premise of the same material and processing technology, the bias instability, bias stability, zero bias, Angular Random Walk (ARW), and frequency split of WMMCRG is 1.974°/h, 10.869°/h, 10.3323°/s, 16 (°)/√h, 0.02 Hz, respectively.