A self-moving precision positioning stage utilizing impact force of spring-mounted piezoelectric actuator

Liu, Yung-Tien; Wang, Chengwei

doi:10.1016/s0924-4247(02)00388-6

Cited by 30 publications

(11 citation statements)

References 23 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Taking advantages of high stiffness, compact size, unlimited displacement resolution, large force generation, fast response as well as low power consumption, piezoactuators have been widely used in the fields of precision positioning [ 1 – 3 ], nanofabrication [ 4 – 7 ], micromanipulation [ 8 – 10 ], scanning probe microscopes [ 11 , 12 ] and nanomechanical testing systems [ 13 – 16 ].…”

Section: Introductionmentioning

confidence: 99%

Design and Analysis of a Compact Precision Positioning Platform Integrating Strain Gauges and the Piezoactuator

Huang

Zhao

Yang

et al. 2012

Sensors

View full text Add to dashboard Cite

Miniaturization precision positioning platforms are needed for in situ nanomechanical test applications. This paper proposes a compact precision positioning platform integrating strain gauges and the piezoactuator. Effects of geometric parameters of two parallel plates on Von Mises stress distribution as well as static and dynamic characteristics of the platform were studied by the finite element method. Results of the calibration experiment indicate that the strain gauge sensor has good linearity and its sensitivity is about 0.0468 mV/μm. A closed-loop control system was established to solve the problem of nonlinearity of the platform. Experimental results demonstrate that for the displacement control process, both the displacement increasing portion and the decreasing portion have good linearity, verifying that the control system is available. The developed platform has a compact structure but can realize displacement measurement with the embedded strain gauges, which is useful for the closed-loop control and structure miniaturization of piezo devices. It has potential applications in nanoindentation and nanoscratch tests, especially in the field of in situ nanomechanical testing which requires compact structures.

show abstract

Section: Introductionmentioning

confidence: 99%

Design and Analysis of a Compact Precision Positioning Platform Integrating Strain Gauges and the Piezoactuator

Huang

Zhao

Yang

et al. 2012

Sensors

View full text Add to dashboard Cite

show abstract

“…The two most common types are inchworm motors [1,2] and the related walking motors [3,4] which will be discussed in detail below. Other less common modes of locomotion can also be used, such as impact motors [5], scratch drive motors [6], and frictional motors [7] but are not discussed in this paper.…”

Section: Introductionmentioning

confidence: 99%

MEMS earthworm: a thermally actuated peristaltic linear micromotor

Arthur

Ellerington

Hubbard

et al. 2011

J. Micromech. Microeng.

View full text Add to dashboard Cite

This paper examines the design, fabrication and testing of a bio-mimetic MEMS (micro-electro mechanical systems) earthworm motor with external actuators. The motor consists of a passive mobile shuttle with two flexible diamond-shaped segments; each segment is independently squeezed by a pair of stationary chevron-shaped thermal actuators. Applying a specific sequence of squeezes to the earthworm segments, the shuttle can be driven backward or forward. Unlike existing inchworm drives that use clamping and thrusting actuators, the earthworm actuators apply only clamping forces to the shuttle, and lateral thrust is produced by the shuttle's compliant geometry. The earthworm assembly is fabricated using the PolyMUMPs process with planar dimensions of 400 µm width by 800 µm length. The stationary actuators operate within the range of 4–9 V and provide a maximum shuttle range of motion of 350 µm (approximately half its size), a maximum shuttle speed of 17 mm s−1 at 10 kHz, and a maximum dc shuttle force of 80 µN. The shuttle speed was found to vary linearly with both input voltage and input frequency. The shuttle force was found to vary linearly with the actuator voltage.

show abstract

“…However, the total displacement of a PZT actuator is only a few microns, and thus a number of practical efforts have been made to overcome this drawback. Typical displacement amplifying mechanisms can be categorized into: (a) the lever-type mechanisms using flexural hinges [1-5]; (b) the flexural hinge coupled with specific mechanical structures, such as slidercrank, parallelogram four-bar, and five-bar mechanisms [6-8]; (c) the inchworm driving mechanism, or walking drive mechanism, consisting of several PZT actuators [9-11]; (d) the self-moving and/or stick-slip driving mechanisms utilizing only one PZT actuator [12][13][14][15][16][17]; and (e) the PZT actuator coupled with the usual mechanical components, such as DC servo and linear motors [18,19], pneumatic cylinders [20, 21], hydraulic cylinders [22, 23], voice-coil motors [24][25][26]; and even passive elements such as springs [27,28]. This article contributes to the literature by examining the characteristics of a one-degree-of-freedom (DOF) precision positioning device using spring-mounted PZT actuators.…”

Section: Introductionmentioning

confidence: 99%

A study of the characteristics of a one-degree-of-freedom positioning device using spring-mounted piezoelectric actuators

Wang

2009

Proceedings of the Institution of Mechanical Engineers, Part C:

View full text Add to dashboard Cite

This article presents the actuating performance of a one-degree-of-freedom (DOF) positioning device using spring-mounted piezoelectric (PZT) actuators. To employ a spring with a preset compression, the operational range of a PZT actuator could be simply enlarged, and a sliding table actuated by PZT impact force might feature long stroke and high-precision positioning ability. An experimental set-up consisting of two spring-mounted PZT actuators was configured to examine the actuating characteristics. According to experimental results, a sliding table with a heavy mass of 172 g could be actuated to move with a step motion ranging from 15 nm to 81 µm by only one single actuation of the PZT actuator, and with a maximum travelling speed of 3.47 mm/s by continuous actuation. In addition to experimental examinations, a dynamic model was established and verified as effective in describing the actuating behaviours through numerical examinations.

show abstract

A self-moving precision positioning stage utilizing impact force of spring-mounted piezoelectric actuator

Cited by 30 publications

References 23 publications

Design and Analysis of a Compact Precision Positioning Platform Integrating Strain Gauges and the Piezoactuator

Design and Analysis of a Compact Precision Positioning Platform Integrating Strain Gauges and the Piezoactuator

MEMS earthworm: a thermally actuated peristaltic linear micromotor

A study of the characteristics of a one-degree-of-freedom positioning device using spring-mounted piezoelectric actuators

Contact Info

Product

Resources

About