1980
DOI: 10.1088/0022-3727/13/4/014
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A SEM-EBIC minority-carrier lifetime-measurement technique

Abstract: A SEM-EBIC minority-carrier lifetime-measurement method is described, whereby an arrangement is used such that the electron beam is incident normal to the charge-collecting barrier; the barrier may be either that of a Schottky diode or of a very shallow p-n junction. The beam is positioned at a constant point over the barrier, and the lifetime is found by rapidly switching off the beam and analysing the resulting EBIC time decay. In many practical cases this decay is given by I(t) varies as (exp(-t/ tau ))/t1/… Show more

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Cited by 24 publications
(12 citation statements)
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“…which is identical to the expression derived by Ioannou and Dimitriadis [11]. The same result can also be obtained from (4.5) and (4.7) by taking the limit as A ~ oo.…”
Section: P(xy)=2~ko(((x-xo)2+(y-yo)2)i/2)-2~ko(((x-xo)2+(y+yo)supporting
confidence: 86%
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“…which is identical to the expression derived by Ioannou and Dimitriadis [11]. The same result can also be obtained from (4.5) and (4.7) by taking the limit as A ~ oo.…”
Section: P(xy)=2~ko(((x-xo)2+(y-yo)2)i/2)-2~ko(((x-xo)2+(y+yo)supporting
confidence: 86%
“…Through repeated integration by parts in (5.2), using the well-known recurrence relation for the modified Bessel functions Km, we deduce the complete asymptotic expansion l/2yorr,/2X3o/2 (6.12) This result is identical to the asymptotic expansion derived by Ioannou and Dimitriadis [11]. Notice that (6.12) also follows by setting ~ = oo in (6.3).…”
Section: )supporting
confidence: 63%
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“…In EBIC, few-electron-volt secondary electrons and electron-hole pairs created by a primary beam at 250 eV to 25 keV (Figure 1.a) interact strongly with the built-in device fields. Current is collected via auxiliary electrodes connected to different parts of the device ( Figure 1.b), resulting in a local measurement of the electronic structure stimulated by the incident electron beam 18 .…”
Section: Introductionmentioning
confidence: 99%