A silicon subminiature microphone based on piezoresistive polysilicon strain gauges

Schellin, R.; Hess, G.

doi:10.1016/0924-4247(92)80043-3

Cited by 71 publications

(21 citation statements)

References 4 publications

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“…Recently several kinds of MEMS microphone technologies have been proposed, such as condenser [1][2][3][4], electret [5][6], piezoresistive [7][8][9], and ferroelectric microphones [10][11]. However, condenser and ferroelectric microphones are popular ones due to their excellent performances.…”

Section: Introductionmentioning

confidence: 99%

MEMS acoustic sensor using PMN-PT single-crystal diaphragm

et al. 2006

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The MEMS (micro-electro-mechanical systems) microphone enables the manufacturing of small mechanical components on the surface of a silicon wafer. The MEMS microphones are less susceptible to vibration because of the smaller diaphragm mass and an excellent candidate for chip-scale packaging. The PMN-PT materials itself exhibit extremely high piezoelectric coefficients and other desirable properties for an acoustic sensor. In this paper, we present a piezoelectric MEMS microphone based on PMN-PT single crystal diaphragm. The fabrication process including dry etching conditions and scale-factored prototype is presented. In particular, this paper introduces the design of a PMN-PT single crystal diaphragm with interdigitated electrode.

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Section: Introductionmentioning

confidence: 99%

MEMS acoustic sensor using PMN-PT single-crystal diaphragm

et al. 2006

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“…[1][2][3][4][5][6] Piezoresistive transduction exhibits favorable scaling for small size compared to capacitive techniques. 7 Internal noise sources in piezoresistive microphones are divided into two categories.…”

Section: Introductionmentioning

confidence: 99%

Sources of excess noise in silicon piezoresistive microphones

Dieme

Bosman

Nishida

et al. 2006

The Journal of the Acoustical Society of America

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This paper provides evidence for electrical 1 / f noise as the dominant source of excess noise in piezoresistive microelectromechanical systems ͑MEMS͒ microphones. In piezoresistors, the fundamental noise sources may be divided into frequency independent thermal noise and frequency dependent 1 / f excess noise dominating at low frequencies. Noise power spectra are presented for both commercial and research-prototype MEMS piezoresistive microphones as a function of applied voltage bias for both free and blocked membranes. The contributions of various mechanical and electrical noise sources are compared using a lumped noise equivalent circuit of the piezoresistive microphone. The bias dependence and membrane independence of the output noise indicate that the primary source of the excess noise is electrical in origin.

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“…The three main approaches investigated have been capacitive, piezoresistive, and piezoelectric [1][2][3][4][5][6][7]. A majority of these past research efforts have focused on developing a microphone that is compatible with CMOS processing.…”

Section: Introductionmentioning

confidence: 99%

Design and Fabrication of a Lead Zirconate Titanate (PZT) Thin Film Acoustic Sensor

Polcawich

Scanlon

Pulskamp

et al. 2003

Integrated Ferroelectrics

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Piezoelectric MEMS acoustic sensors have potential applications in a wide variety of applications including hearing aids, surveillance, heart monitoring, etc. For each of these systems and many others, the acoustic sensors must be miniaturized and have low power requirements. A piezoelectric based microphone can provide a solution to these requirements, as they offer the ability to passively sense without the power requirements of condenser or piezoresistive microphone counterparts. This research effort reports on the design and fabrication of a piezoelectric PZT based acoustic sensor. A circular clamped membrane consisting of a dielectric for structural support and a piezoelectric actuator has been fabricated on a silicon wafer using silicon deep reactive ion etching (DRIE). Sensors ranging from 500-2000 microns in diameter have been fabricated and characterized using scanning laser Doppler vibrometry and calibrated acoustic tone sources. The PZT sensors exhibited a sensitivity of 97.9-920 nV/Pa depending on geometry.

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A silicon subminiature microphone based on piezoresistive polysilicon strain gauges

Cited by 71 publications

References 4 publications

MEMS acoustic sensor using PMN-PT single-crystal diaphragm

MEMS acoustic sensor using PMN-PT single-crystal diaphragm

Sources of excess noise in silicon piezoresistive microphones

Design and Fabrication of a Lead Zirconate Titanate (PZT) Thin Film Acoustic Sensor

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