2002
DOI: 10.1016/s0038-1101(02)00248-4
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A simple efficient model of parasitic capacitances of deep-submicron LDD MOSFETs

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Cited by 57 publications
(32 citation statements)
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“…Work reported in the literature so far focused on C fringe to understand the scaling on L poly , gate oxide height, and gate height in the absence of contacts [4,5], and on parasitic capacitance contributions such as overlap and fringing [6]. Analytic approximations with optimization parameters have been used in [7], but ignore complex geometric and material effects in advanced CMOS transistors.…”
Section: Field Solver Simulationsmentioning
confidence: 99%
“…Work reported in the literature so far focused on C fringe to understand the scaling on L poly , gate oxide height, and gate height in the absence of contacts [4,5], and on parasitic capacitance contributions such as overlap and fringing [6]. Analytic approximations with optimization parameters have been used in [7], but ignore complex geometric and material effects in advanced CMOS transistors.…”
Section: Field Solver Simulationsmentioning
confidence: 99%
“…In general, C p is expressed as the sum of C of , C ov , and C if where C of is the outer fringing capacitance, C ov is the bias-dependent gate to source/drain overlap capacitance, and C if is the biasdependent inner fringing capacitance caused by the depletion region between the LDD(lightly doped drain) and poly Si gate [7][8][9].…”
Section: Introductionmentioning
confidence: 99%
“…The parasitic capacitances are becoming an important issue for designing logic circuits wit h aggressive reduction of MOS transistor dimensions into the deep sub µm regime [1][2][3][4][5] . In digital applications, these parasitic capacitances have a very strong impact on propagation delay and the overall power dissipation of the circuit.…”
Section: Introductionmentioning
confidence: 99%