A Six-Axis MEMS Force–Torque Sensor With Micro-Newton and Nano-Newtonmeter Resolution

Beyeler, Felix; Muntwyler, Simon; Nelson, Bradley J.

doi:10.1109/jmems.2009.2013387

Cited by 143 publications

(78 citation statements)

References 19 publications

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“…Microelectromechanical systems (MEMSs) capacitive force sensors utilize comb structures to detect capacitance changes that are induced by externally applied forces 79,80 . A Nanorobotic manipulation inside SEM C Shi et al two-axis MEMS capacitive force sensor 81,82 and an improved six-axis capacitive force sensor 83 were constructed via deep reactive ion etching of silicon on insulator (SOI) substrates. These capacitive force sensors are capable of measuring forces from a few nanonewtons to micronewtons.…”

Section: Sensingmentioning

confidence: 99%

Recent advances in nanorobotic manipulation inside scanning electron microscopes

et al. 2016

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A scanning electron microscope (SEM) provides real-time imaging with nanometer resolution and a large scanning area, which enables the development and integration of robotic nanomanipulation systems inside a vacuum chamber to realize simultaneous imaging and direct interactions with nanoscaled samples. Emerging techniques for nanorobotic manipulation during SEM imaging enable the characterization of nanomaterials and nanostructures and the prototyping/assembly of nanodevices. This paper presents a comprehensive survey of recent advances in nanorobotic manipulation, including the development of nanomanipulation platforms, tools, changeable toolboxes, sensing units, control strategies, electron beam-induced deposition approaches, automation techniques, and nanomanipulation-enabled applications and discoveries. The limitations of the existing technologies and prospects for new technologies are also discussed.

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Section: Sensingmentioning

confidence: 99%

Recent advances in nanorobotic manipulation inside scanning electron microscopes

et al. 2016

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“…Microsystems for measuring forces and mechanical properties of different materials at micro/nanoscale have gained an important role for probing biological samples in in vitro mechanobiology experiments [2,3]. In particular, the measurement of minute forces without requiring an associated displacement is a critical task.…”

Section: Introductionmentioning

confidence: 99%

Servo-Assisted Position-Feedback MEMS Force Sensor with Tunable Sensitivity and Sub-Nanonewton Range

Nastro

Ferrari

Russo

et al. 2017

Proceedings of Eurosensors 2017, Paris, France, 3–6 September 2017

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A Micro Electro-Mechanical System (MEMS) that allows to measure an external force applied to a probe tip exploiting an electrical servo-assisted mechanism based on position feedback is presented. The sensor architecture keeps the position of the probe tip fixed by driving a pair of variable-area electrostatic actuators in a feedback loop controlled by a variable-gap capacitive sensor. By adjusting specific loop parameters, the force sensitivity can be finely tuned electrically. Sub-nanonewton measurement range is achieved with high flexibility in setting the tip working point, making the system promising for measuring forces generated by living biological cells.

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“…Several force-sensing devices have been developed, but most of them measure the forces in a limited number of degrees of freedom (DOF) [3] [4]. Only a few are able to monitor loads along 6 DOF [5] [6]. Moreover, most of the developed sensing devices adopt symmetric structures to eliminate crosstalk.…”

Section: Introdumentioning

confidence: 99%

“…This limits the access to probing points and the integration of manipulation tools. The only asymmetrical 6 DOF micro-force sensor known by the authors is the capacitive sensing device developed in [6].…”

Section: Introdumentioning

confidence: 99%

6 DOF force and torque sensor for micro-manipulation applications

Estévez

Bank

Porta

et al. 2012

Sensors and Actuators A: Physical

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A Six-Axis MEMS Force–Torque Sensor With Micro-Newton and Nano-Newtonmeter Resolution

Cited by 143 publications

References 19 publications

Recent advances in nanorobotic manipulation inside scanning electron microscopes

Recent advances in nanorobotic manipulation inside scanning electron microscopes

Servo-Assisted Position-Feedback MEMS Force Sensor with Tunable Sensitivity and Sub-Nanonewton Range

6 DOF force and torque sensor for micro-manipulation applications

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