A Small and High Sensitivity Resonant Accelerometer

Pinto, Domenico; Mercier, Denis; Kharrat, Chady; Colinet, Éric; Nguyễn, Việt Hùng; Reig, B.; Hentz, Sébastien

doi:10.1016/j.proche.2009.07.134

Cited by 30 publications

(12 citation statements)

References 2 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The TEC of silicon is 2 ppm/K, nearly two orders of magnitude lower than adhesive. (2) The data below glass transition temperature (56 • C)/above transition temperature.…”

Section: The Model Of the Resonator Temperature Characteristicmentioning

confidence: 99%

Analysis of Frequency Drift of Silicon MEMS Resonator with Temperature

et al. 2020

View full text Add to dashboard Cite

High-quality-factor Micro-Electro-Mechanical System (MEMS) resonators have been widely used in sensors and actuators to obtain great mechanical sensitivity. The frequency drift of resonator with temperature is a problem encountered practically. The paper focuses on the resonator frequency distribution law in the temperature range of—40 to 60 °C. The four-layer models were established to analyze thermal stress caused by temperature due to the mismatch of thermal expansion coefficients. The temperature variation leads to the transformation of stress, which leads to the shift of resonance frequency. The paper analyzes the influence of hard and soft adhesive package on the temperature coefficient of frequency. The resonant accelerometer was employed for the frequency measurements in the paper. In experiments, three types of adhesive dispensing patterns were implemented. The results are consistent with the simulation well. The optimal packaging method achieves −24.1 ppm/°C to −30.2 ppm/°C temperature coefficient of the resonator in the whole temperature range, close to the intrinsic property of silicon (−31 ppm).

show abstract

“…The TEC of silicon is 2 ppm/K, nearly two orders of magnitude lower than adhesive. (2) The data below glass transition temperature (56 • C)/above transition temperature.…”

Section: The Model Of the Resonator Temperature Characteristicmentioning

confidence: 99%

Analysis of Frequency Drift of Silicon MEMS Resonator with Temperature

et al. 2020

View full text Add to dashboard Cite

show abstract

“…The MEMS resonant accelerometer uses the frequency signal to achieve the purpose of measurement [7]. The resonant beam is the core component of such an accelerometer.…”

Section: Resonant Accelerometermentioning

confidence: 99%

Summary of Research Status and Application of MEMS Accelerometers

Niu¹,

Fang²,

Xu³

et al. 2018

JCC

View full text Add to dashboard Cite

The rapid development of MEMS technology has made MEMS accelerometers mature and the application range has been expanded. Many kinds of MEMS accelerometers are researched. According to the working principle of MEMS accelerometer, it can be divided into: piezoresistive, piezoelectric, capacitive, tunnel, resonant, electromagnetic, thermocouple, optical, inductive, etc. Due to its outstanding features in terms of size, quality, power consumption and reliability, MEMS sensors are used in military applications and where high environmental resistance is required. MEMS accelerometers are developing rapidly and have good application prospects. In order to make MEMS accelerometers more widely understood, the advantages of MEMS accelerometers are expounded. The research status of MEMS accelerometers is introduced, and MEMS are analyzed. The application of accelerometers in real-world environments, and the development trend of MEMS accelerometers in the future. More scholars will invest in MEMS accelerometer research, pursuing high performance, low power consumption, high precision, multi-function, and interaction. Strong MEMS accelerometers will be ubiquitous in the future.

show abstract

“…Microelectromechanical accelerometers can be found in numerous applications such as inertial navigation systems, gaming, smartphones and mobile devices [ 1 ]. These devices are very attractive for high-precision measurement applications due to their high sensitivity, frequency output and large dynamic range [ 2 , 3 , 4 ]. In a silicon micro-machined resonant accelerometer (SMRA), the acceleration is measured through the differential frequency shift originated by axial loading between the two pull and push double-ended tuning fork (DETF) resonators.…”

Section: Introductionmentioning

confidence: 99%

“…Recently, the design and fabrication of various mechanical resonant accelerometers have been studied [ 1 , 6 , 7 ]. Pinto et al , have presented the design of a very small and sensitive resonant accelerometer [ 4 ]. By using thin silicon-on-insulator (SOI)-based technologies compatible with “In-IC“ integration, the accelerometer size has been reduced drastically (0.05 mm 2 × 4.2 μm) with a sensitivity of 22 Hz/g.…”

Section: Introductionmentioning

confidence: 99%

Microelectromechanical Resonant Accelerometer Designed with a High Sensitivity

Zhang

Shi

et al. 2015

Sensors

View full text Add to dashboard Cite

This paper describes the design and experimental evaluation of a silicon micro-machined resonant accelerometer (SMRA). This type of accelerometer works on the principle that a proof mass under acceleration applies force to two double-ended tuning fork (DETF) resonators, and the frequency output of two DETFs exhibits a differential shift. The dies of an SMRA are fabricated using silicon-on-insulator (SOI) processing and wafer-level vacuum packaging. This research aims to design a high-sensitivity SMRA because a high sensitivity allows for the acceleration signal to be easily demodulated by frequency counting techniques and decreases the noise level. This study applies the energy-consumed concept and the Nelder-Mead algorithm in the SMRA to address the design issues and further increase its sensitivity. Using this novel method, the sensitivity of the SMRA has been increased by 66.1%, which attributes to both the re-designed DETF and the reduced energy loss on the micro-lever. The results of both the closed-form and finite-element analyses are described and are in agreement with one another. A resonant frequency of approximately 22 kHz, a frequency sensitivity of over 250 Hz per g, a one-hour bias stability of 55 μg, a bias repeatability (1σ) of 48 μg and the bias-instability of 4.8 μg have been achieved.

show abstract

A Small and High Sensitivity Resonant Accelerometer

Cited by 30 publications

References 2 publications

Analysis of Frequency Drift of Silicon MEMS Resonator with Temperature

Analysis of Frequency Drift of Silicon MEMS Resonator with Temperature

Summary of Research Status and Application of MEMS Accelerometers

Microelectromechanical Resonant Accelerometer Designed with a High Sensitivity

Contact Info

Product

Resources

About