A small size high pressure sensor based on metal thin film technology

Stoetzler, A.; Dittmann, D.; Henn, Ralf; Jasenek, Axel; Klopf, F.; Scharping, A.; Frey, W; Didra, H.P.; Metz, M.

doi:10.1109/icsens.2007.4388528

Cited by 10 publications

(2 citation statements)

References 5 publications

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“…High-pressure measurement requires a special sensor design to ensure high performance and safety over a wide temperature range. Commonly used high-pressure sensor technology includes an oil-filled pressure sensor based on the MEMS [1][2][3], a micro fused silicon strain gauge (MSG) sensor [4][5][6][7][8], a thin-film strain gauge pressure sensor [9][10][11] and a thick ceramic film pressure sensor [12][13][14]. The first three key technologies use a steel diaphragm: these stainless-steel transducers can also operate with a full-scale accuracy of 0.5% over a wide temperature range from −40 • C to 150 • C.…”

Section: Introductionmentioning

confidence: 99%

Half-Bridge Silicon Strain Gauges with Arc-Shaped Piezoresistors

Han,

Min,

Lee

et al. 2023

Sensors

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Half-bridge silicon strain gauges are widely used in the fabrication of diaphragm-type high-pressure sensors, but in some applications, they suffer from low output sensitivity because of mounting position constraints. Through a special design and fabrication approach, a new half-bridge silicon strain gauge comprising one arc gauge responding to tangential strain and another linear gauge measuring radial strain was developed using Silicon-on-Glass (SiOG) substrate technology. The tangential gauge consists of grid patterns, such as the reciprocating arc of silicon piezoresistors on a thin glass substrate. When two half-bridges are connected to form a full bridge with arc-shaped gauges that respond to tangential strain, they have the advantage of providing much higher output sensitivity than a conventional half-bridge. Pressure sensors tested under pressure ranging from 0 to 50 bar at five different temperatures indicate a linear output with a typical sensitivity of approximately 16 mV/V/bar, a maximum zero shift of 0.05% FS, and a span shift of 0.03% FS. The higher output level of pressure sensing gauges will provide greater signal strength, thus maintaining a better signal-to-noise ratio than conventional pressure sensors. The offset and span shift curves are quite linear across the operating temperature range, giving the end user the advantage of using very simple algorithms for temperature compensation of offset and span shift.

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Section: Introductionmentioning

confidence: 99%

Half-Bridge Silicon Strain Gauges with Arc-Shaped Piezoresistors

Han,

Min,

Lee

et al. 2023

Sensors

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show abstract

“…Metallic gauges have a low gauge factor (typically around 2), which indicates that the low output from the gauge bridge circuit has to be amplified by a high-gain amplifier. The metallic strain gauges are designed in the traditional circular pattern [ 8 , 9 , 10 , 11 ], allowing the incorporation of a full bridge into a single strain gauge, as shown in Figure 1 a, to take advantage of the maximum tangential and radial strains described above. Gauges R 1 and R 4 , which are placed near the periphery, respond to compressive radial strain, respectively, whereas gauges R 2 and R 3 placed around the center respond to tensile tangential strain, respectively.…”

Section: Introductionmentioning

confidence: 99%

Reciprocating Arc Silicon Strain Gauges

Han

Min²,

Kim

et al. 2023

Sensors

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Currently, silicon-strain-gauge-based diaphragm pressure sensors use four single-gauge chips for high-output sensitivity. However, the four-single-gauge configuration increases the number of glass frit bonds and the number of aluminum wire bonds, reducing the long-term stability, reliability, and yield of the diaphragm pressure sensor. In this study, a new design of general-purpose silicon strain gauges was developed to improve the sensor output voltage while reducing the number of bonds. The new gauges consist grid patterns with a reciprocating arc of silicon piezoresistors on a thin glass backing. The gauges make handling easier in the bonding process due to the use of thin glass for the gauge backing. The pressure sensors were tested under pressure ranging from 0 to 50 bar at five different temperatures, with a linear output with a typical sensitivity of approximately 16 mV/V/bar and an offset shift of –6 mV to 2 mV. The new approach also opens the possibility to extend arc strain gauges to half-bridge and full-bridge configurations to further reduce the number of glass frit and Al wire bonds in the diaphragm pressure sensor.

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Performance Enhancement in Stainless Steel Pressure Sensor

Yenuganti

2020

Lecture Notes in Electrical Engineering

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A small size high pressure sensor based on metal thin film technology

Cited by 10 publications

References 5 publications

Half-Bridge Silicon Strain Gauges with Arc-Shaped Piezoresistors

Half-Bridge Silicon Strain Gauges with Arc-Shaped Piezoresistors

Reciprocating Arc Silicon Strain Gauges

Performance Enhancement in Stainless Steel Pressure Sensor

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