“…High resolution, long motion range, compact size, and high velocity are key performances required in such systems. In this regard, piezoelectric elements (PZTs) offer outstanding potentials due to their excellent performances, such as high positioning accuracy, small size, and high response (Peng et al, 2013(Peng et al, , 2015aShimizu et al, 2013;Zhang et al, 2018Zhang et al, , 2019aZhang et al, , 2019b.…”