The dependence of the electrical conductivity of pure (99.999%) and tin‐doped indium oxide (In2O3) ceramics on oxygen partial pressure
was investigated at 800° and 850°C. The doping amount of tin was 100–1000 ppm, which is within the solubility limit at the temperatures measured. The conductivity of doped ceramics was independent of
, and the carrier concentration was almost the same as the estimated value from the tin content. The conductivity of the pure In2O3 ceramic was proportional to. By considering a singly charged defect cluster of interstitial indium and interstitial oxygen, , the conductivity dependence is deduced to be proportional to. There are large and three adjacent vacant sites, 8a and 16c, in the In2O3 structure to enter indium and oxygen.