A Study of Grazing Incidence Configurations and Their Effect on X-Ray Diffraction Data

Abstract

In recent years, grazing incidence angle attachments have been shown to be very useful in the phase identification of thin polycrystalline films. These devices are sold commercially as attachments to standard powder diffractometers. The attachment normally consists of a long soller slit assembly and a flat crystal monochromator. The soller slit with or without the monochromator is mounted on the diffracted beam side. In this paper we discuss the effects of different configurations from collimator to monochromator on diffraction data. An understanding of these effects is essential in order to obtain more reliable information on phase transformations, crystallite size, microstrain, and residual stress studies.

A New Metastable Thin‐Film Strontium Tantalate Perovskite

“…The GIXRD method has been discussed in detail elsewhere. 11 Some films were processed only up through the hot-plate treatment and then processed/monitored in situ using hightemperature grazing-incidence X-ray diffraction (HTGIXRD). Details of the HTGIXRD technique have been reported.…”

Characterization of Lead Oxide Thin Films Produced by Chemical Vapor Deposition

“…Furthermore, the interpretation of any line splitting at larger angles (Ն10°) must be done with care, because of the geometric arrangement of the experimental setup. 18 The -2 analysis indicated a predominance of litharge. The electron diffraction patterns analyzed, along with the peak heights observed using GA-XRD, indicated a strong preferred orientation of the lead oxide layers.…”

Grazing excidence diffraction versus grazing incidence diffraction for strain/stress evaluation in thin films

“…This reflection shift is proportional to l/sin(y,), resulting in a large A20 for a small incident angle y ; . Experimental and theoretical analysis of systematic errors in GIXD has been conducted (Segmiiller, 1957;Kunze, 1964;Goehner and Eatough, 1992) and from these studies one knows that for GIXD A20 is the most severe contribution to the total error of the reflection positions. If dynamical diffraction comes into play for single crystalline surfaces, then additional peaks may appear in a diffractogram recorded at an incidence angle near or below the critical angle for total external reflection (Rhan and Peisl, 1996).…”

“…For BBG, GIXD can be realized also, but then the focusing conditions is not fulfilled any more. Therefore, in BBG one uses a long Soller slit on the secondary side of the diffractometer (Goehner and Eatough, 1992). GIXD in BBG is sometimes also called asymmetric Bragg diffraction.…”