A study of the effects of process variables on the properties of PZT films produced by a single-layer sol-gel technique

Tu, Y. L.; Milne, Steven J.

doi:10.1007/bf00362126

Cited by 78 publications

(38 citation statements)

References 17 publications

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“…10 Recently, other workers have studied and tried to modify this acetic acid route but found that the crack-free single-layer thickness on platinized silicon substrates was limited to ϳ0.2 mm. 14 Our laboratory has developed yet another sol-gel route for synthesizing PT and PZT thin films [15][16][17][18] in which crack-free 1 mm thick single-layer PT or PZT films can be obtained using sols made from propanediol solutions of lead acetate and acetylacetonate modified titanium and zirconium alkoxides. 12,13 Others have also reported 7 mm thick PZT films made by a multilayer sol-gel technique on platinized Si substrates.…”

Section: Introductionmentioning

confidence: 99%

Processing and characterization of Pb(Zr, Ti)O₃films, up to 10 μm thick, produced from a diol sol-gel route

Milne

1996

J. Mater. Res.

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A recently developed diol sol-gel route has been modified in order to produce multilayer PbZr 0.53 Ti 0.47 O 3 films on platinized sapphire substrates. Up to 20 depositions of a 1.1 M sol were carried out leading to a final film thickness of 10 mm. A similar thickness could be achieved from 12 coatings of a more concentrated 1.6 M sol. Decomposition and crystallization of the multilayer coatings were performed using a two-stage prefiring sequence, at 350 ± C and 600 ± C, followed by a final firing step at 700 ± C. Ferroelectric remanant polarization increased with increasing film thickness to a value of 40 mC cm 22 for a 10 mm film, with a corresponding coercive field of 30 kV cm 21 ; the relative permittivity of this film was ϳ1000 and the dissipation factor 0.04. The thickness dependence of relative permittivity could be modeled on a simple series capacitor circuit representing the ferroelectric Pb(Zr, Ti)O 3 (PZT) film and low-permittivity interface layers; but other possible contributory factors are also discussed.

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Section: Introductionmentioning

confidence: 99%

Processing and characterization of Pb(Zr, Ti)O₃films, up to 10 μm thick, produced from a diol sol-gel route

Milne

1996

J. Mater. Res.

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“…Sol-gel fabrication [13] in which an organic fluid containing PZT in spun on the wafer and fired at high temperature, and sputter deposition [14] in which a PZT film is created by co-sputtering the correct composition into silicon; are also some means to fabricate the piezoelectric actuator.…”

Section: Mechanical Micropumpmentioning

confidence: 99%

“…Micropumps differ in actuation mechanism, valve mechanism and fabrication process. Pneumatic [5,9], thermopneumatic [5,10], piezoelectric [11,12,13,14], electrostatic [9], bimetallic [15], shape memory effect [16] and electrothermal [17] are some of the mechanical actuation techniques presented in past. In the nonmechanical actuation technique electrohydrodynamic [8], electroosmotic [8,18], ultrasonic [5,8], magnetohydrodynamic [19] are some of the actuation principles.…”

mentioning

confidence: 99%

Polymer Tube Embedded In-Plane Micropump: Design, Analysis and Fabrication

Kole

Sin

Lee

et al. 2005

Electronic and Photonic Packaging, Electrical Systems Design and Photonics, and Nanotechnology

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“…10 Lattice matching between Pt and PZT and the consequent heterogeneous nucleation of PZT is thought to promote (111) orientation in conventionally heat-treated sol-gel PZT films crystallized on Pt-Si, 12 due to crystallization commencing at the PZT-Pt interface. In previous experiments using conventional furnace heat treatments for films deposited using the THOME sols on Pt-Si substrates, a strong preferred orientation in the ͗111͘ direction was also observed.…”

Section: A Structural Propertiesmentioning

confidence: 99%

Rapid thermal processing of lead zirconate titanate thin films on Pt–GaAs substrates based on a novel 1,1,1-tris(hydroxymethyl)ethane sol-gel route

et al. 1999

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Thin films of lead zirconate titanate (PZT) having a nominal composition of Pb(Zr 0.53 Ti 0.47 )O 3 have been prepared on platinized GaAs (Pt-GaAs) substrates using a new 1,1,1-tris(hydroxymethyl)ethane (THOME) based sol-gel technique. Rapid thermal processing (RTP) techniques were used to decompose the sol-gel layer to PZT in an effort to avoid problems of Ga͞As outdiffusion into the PZT. A crystalline PZT film was produced by firing the sol-gel coatings at 600 or 650 ± C for a dwell time of 1 s using RTP. A single deposition of the precursor sol resulted in a 0.4 mm thick PZT film. X-ray diffraction measurements revealed that the films possessed a high degree of (111) preferred orientation. Measured average values of remanent polarization (P r ) and coercive field (E c ) for the film annealed at 650 ± C for 1 s were 24 mC͞cm 2 and 32 kV͞cm, respectively, together with a low frequency dielectric constant and loss tangent at 1 kHz of 950 and 0.02. These values are comparable to those obtainable on platinized silicon (Pt-Si) substrates using conventional sol-gel methods, and are an improvement on PZT thin films prepared on platinized GaAs using an earlier sol-gel route based on 1,3-propanediol. 494

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A study of the effects of process variables on the properties of PZT films produced by a single-layer sol-gel technique

Cited by 78 publications

References 17 publications

Processing and characterization of Pb(Zr, Ti)O₃films, up to 10 μm thick, produced from a diol sol-gel route

Processing and characterization of Pb(Zr, Ti)O₃films, up to 10 μm thick, produced from a diol sol-gel route

Polymer Tube Embedded In-Plane Micropump: Design, Analysis and Fabrication

Rapid thermal processing of lead zirconate titanate thin films on Pt–GaAs substrates based on a novel 1,1,1-tris(hydroxymethyl)ethane sol-gel route

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A study of the effects of process variables on the properties of PZT films produced by a single-layer sol-gel technique

Cited by 78 publications

References 17 publications

Processing and characterization of Pb(Zr, Ti)O3films, up to 10 μm thick, produced from a diol sol-gel route

Processing and characterization of Pb(Zr, Ti)O3films, up to 10 μm thick, produced from a diol sol-gel route

Polymer Tube Embedded In-Plane Micropump: Design, Analysis and Fabrication

Rapid thermal processing of lead zirconate titanate thin films on Pt–GaAs substrates based on a novel 1,1,1-tris(hydroxymethyl)ethane sol-gel route

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Product

Resources

About

Processing and characterization of Pb(Zr, Ti)O₃films, up to 10 μm thick, produced from a diol sol-gel route

Processing and characterization of Pb(Zr, Ti)O₃films, up to 10 μm thick, produced from a diol sol-gel route