A study on the characteristics of TiOxNy thin films with various nitrogen flow rate by PECVD method

Cho, S.-J.; Jung, Chul Woo; Boo, Jin‐Hyo

doi:10.1016/j.cap.2012.05.037

Cited by 16 publications

(7 citation statements)

References 16 publications

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“…Also, the scattering effect of X-ray radiations can be produced out of phase diffraction at the interface between TiO 2 /TiN layers 33 , 34 , hence don't verified the Bragg condition. Moreover, the higher reactivity of oxygen towards titanium lead to prefer the formation of Ti–O bonds compared than Ti-N bonds and hence helps the formation of TiO 2 phase which is thermodynamically stable phase 35 .…”

Section: Resultsmentioning

confidence: 99%

Preparation of hexagonal nanoporous Al2O3/TiO2/TiN as a novel photodetector with high efficiency

Elsayed

Rabia

Shaban

et al. 2021

Sci Rep

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The unique optical properties of metal nitrides enhance many photoelectrical applications. In this work, a novel photodetector based on TiO2/TiN nanotubes was deposited on a porous aluminum oxide template (PAOT) for light power intensity and wavelength detection. The PAOT was fabricated by the Ni-imprinting technique through a two-step anodization method. The TiO2/TiN layers were deposited by using atomic layer deposition and magnetron sputtering, respectively. The PAOT and PAOT/TiO2/TiN were characterized by several techniques such as X-ray diffraction (XRD), scanning electron microscope (SEM), and energy dispersive X-ray (EDX). The PAOT has high-ordered hexagonal nanopores with dimensions ~ 320 nm pore diameter and ~ 61 nm interpore distance. The bandgap of PAOT/TiO2 decreased from 3.1 to 2.2 eV with enhancing absorption of visible light after deposition of TiN on the PAOT/TiO2. The PAOT/TiO2/TiN as photodetector has a responsivity (R) and detectivity (D) of 450 mAW-1 and 8.0 × 1012 Jones, respectively. Moreover, the external quantum efficiency (EQE) was 9.64% at 62.5 mW.cm−2 and 400 nm. Hence, the fabricated photodetector (PD) has a very high photoelectrical response due to hot electrons from the TiN layer, which makes it very hopeful as a broadband photodetector.

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Section: Resultsmentioning

confidence: 99%

Preparation of hexagonal nanoporous Al2O3/TiO2/TiN as a novel photodetector with high efficiency

Elsayed

Rabia

Shaban

et al. 2021

Sci Rep

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“…This indicates more oxidized state of Ti species than that of TiO 2 due to the incorporation of nitrogen atoms. The increase in Ti atoms with increasing oxygen flux can be due to the connection with O and N atoms [42]. From Fig.2 (b), a decrease in N1s peak with increasing oxygen partial pressure was seen, indicating higher incorporation of oxygen atoms.…”

Section: Microstructure and Chemical Analysismentioning

confidence: 87%

Structural, Optical and Electrical Properties of Electron Beam Evaporated Tioxny Films as Selective Solar Absorber Coatings

2020

AMSE

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Titanium oxinitride (TiOx Ny ) solar absorber coatings were deposited at different oxygen partial pressures onto Cu, Si and glass substrates using electron beam evaporation technique. XRD diffraction patterns evidenced (111), (200) and (220) orientation of TiNx phase. The preferred orientation of the films changed with oxygen partial pressure. XPS revealed the intensity of both Ti 2P3/2 and Ti 2P1/2 increases as a function of oxygen flow, and also shifted towards higher binding energy, indicating more oxidized state of Ti species than that of TiO2 due to incorporation of nitrogen atoms. Formation of uniformly distributed spherical like particles and an increase in surface roughness of the TiOx Ny films were observed as a function of oxygen partial pressure as depicted from SEM and AFM, respectively. Ellipsometric and resistivity measurements showed a shift from metallic to semiconductor behaviour of the TiOx Ny films as oxygen flow changed. A solar absorptance value of 0.94 in the solar spectrum region and a low thermal emittance value of 0.05 were achieved for the TiOx Ny solar absorber coatings prepared at the oxygen partial pressure of 7.5x10-5 Torr due to both interference and intrinsic absorption. This study confirmed that a single layer of TiOx Ny film can be a good candidate as selective solar absorber.

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“…This is similar to a cermet, such as W-Al 2 O 3 , 10 Cr-Cr 2 O 3 , 11 Mo-Si 3 N 4 , 12 in which the metal nanoparticles are dispersed in the dielectric matrix. For TiN x O y films, their optical properties can be tuned by adjusting the N/O ratio of the films; 6,13,14 for example, it was reported that optical properties of the TiN x O y films fabricated by reactive mid-frequency magnetron sputtering from titanium nitride target can be controlled in terms of the reactive gas flow rate. 6 This adds the flexibility to optimize the performance of solar absorber.…”

mentioning

confidence: 99%

Design of a High Performance Selective Solar Absorber with the Structure of SiO₂-TiO₂-TiN_xO_y-Cu

Zhang

Chen

Liu

et al. 2016

ECS J. Solid State Sci. Technol.

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Using TiN x O y thin film as the absorbing layer, a spectrally selective solar absorber (SSA) with the structure of SiO 2 -TiO 2 -TiN x O y -Cu has been designed; and the SSA performance has been evaluated by both calculation and experiment. The TiN x O y layer is fabricated by RF magnetron sputtering of a pure TiN target with Ar and N 2 gases. The introduction of oxygen in the TiN x O y is realized by using the residual oxygen in the deposition chamber. It is found that the N 2 flow rate has a large effect on the complex refractive index of the TiN x O y thin film and thus the SSA performance can be optimized by controlling the N 2 flow rate. With the TiN x O y absorbing layer deposited with the N 2 flow rate of 2 sccm, the SSA achieves the highest solar thermal conversion efficiency for a solar radiation concentration factor of equal to or larger than 5. The SSA based on the TiN x O y layer deposited with the N 2 flow rate of 2 sccm has a solar absorbance of 96.29% and a thermal emittance of 6.11% at the temperature of 400 • C.

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A study on the characteristics of TiOxNy thin films with various nitrogen flow rate by PECVD method

Cited by 16 publications

References 16 publications

Preparation of hexagonal nanoporous Al2O3/TiO2/TiN as a novel photodetector with high efficiency

Preparation of hexagonal nanoporous Al2O3/TiO2/TiN as a novel photodetector with high efficiency

Structural, Optical and Electrical Properties of Electron Beam Evaporated Tioxny Films as Selective Solar Absorber Coatings

Design of a High Performance Selective Solar Absorber with the Structure of SiO₂-TiO₂-TiN_xO_y-Cu

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A study on the characteristics of TiOxNy thin films with various nitrogen flow rate by PECVD method

Cited by 16 publications

References 16 publications

Preparation of hexagonal nanoporous Al2O3/TiO2/TiN as a novel photodetector with high efficiency

Preparation of hexagonal nanoporous Al2O3/TiO2/TiN as a novel photodetector with high efficiency

Structural, Optical and Electrical Properties of Electron Beam Evaporated Tioxny Films as Selective Solar Absorber Coatings

Design of a High Performance Selective Solar Absorber with the Structure of SiO2-TiO2-TiNxOy-Cu

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Design of a High Performance Selective Solar Absorber with the Structure of SiO₂-TiO₂-TiN_xO_y-Cu