2019
DOI: 10.3390/mi10040256
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A Technology-Computer-Aided-Design-Based Reliability Prediction Model for DRAM Storage Capacitors

Abstract: A full three-dimensional technology-computer-aided-design-based reliability prediction model was proposed for dynamic random-access memory (DRAM) storage capacitors. The model can be used to predict the time-dependent dielectric breakdown as well as leakage current of a state-of-the-art DRAM storage capacitor with a complex three-dimensional structure.

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Cited by 5 publications
(3 citation statements)
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“…I G in this region is governed by the surface traps. The trap assisted carrier transport is given by [42]:…”
Section: Resultsmentioning
confidence: 99%
“…I G in this region is governed by the surface traps. The trap assisted carrier transport is given by [42]:…”
Section: Resultsmentioning
confidence: 99%
“…where ε, A, and h denote permittivity (dielectric constant K), area, and thickness of the insulating material, respectively. Hence, the capacitance can be increased by increasing the area of conductive parallel plates, minimizing the thickness of the dielectric (distance), or using high permittivity (High-K) materials [33]. Leakage current and depletion effect are critical factors that affect the performance of micro M-I-M capacitors.…”
Section: Related Workmentioning
confidence: 99%
“…The most characteristic aspect is that it can generate the power code. It is based on the above functional integration that makes the numerical control programming function of CAXA suitable for the operation of complex spatial geometry structure [4][5] . Over the years, many experts and scholars have carried out in-depth studies on CAD and manufacturing, and the state and education management departments have also vigorously promoted it.…”
Section: Introductionmentioning
confidence: 99%