2015
DOI: 10.1007/s00170-015-7219-7
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A theoretical analysis and experimental verification of a laser drilling process for a ceramic substrate

Abstract: This paper reports theoretical and experimental methods for drilling alumina ceramic substrates by using a nanosecond-pulsed ultraviolet laser. A physical model was established using ANSYS parameter design language finite element software. The influence of laser parameters, such as laser fluence, number of pulses and its duration, and frequency, on morphology-depth, diameter, taper, and temperature distribution-was investigated using three-dimensional confocal laser scanning microscopy. Simulation and experime… Show more

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Cited by 26 publications
(6 citation statements)
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“…As the number of scans increased, the inlet diameter of the through-hole first increased to saturation, and the outlet diameter gradually increased to a stable state. During laser processing, the diameter of the laser spot was constant, and the size of the material ablation area was constant, which ultimately leads to a constant diameter of the micro hole [20] . As the scanning times increased, the taper of the prefabricated hole increased sharply and then decreased to a stable state.…”
Section: Effect Of Scanning Numbers On Taper Of Prefabricated Holementioning
confidence: 99%
“…As the number of scans increased, the inlet diameter of the through-hole first increased to saturation, and the outlet diameter gradually increased to a stable state. During laser processing, the diameter of the laser spot was constant, and the size of the material ablation area was constant, which ultimately leads to a constant diameter of the micro hole [20] . As the scanning times increased, the taper of the prefabricated hole increased sharply and then decreased to a stable state.…”
Section: Effect Of Scanning Numbers On Taper Of Prefabricated Holementioning
confidence: 99%
“…The model considered for the analysis closely follows the experimental set-up so that the boundary conditions and dimensions are sufficient for simulating the laser drilling process [10,15]. Following are the assumptions made for analysing the laser drilling of Ti6Al4V [10,15,31,32].…”
Section: Numerical Modelmentioning
confidence: 99%
“…The number of pits on the drilling surface is the largest which shows that brittle fracture is the dominant removal manner. A large number of crystalline grains and crystalline grain blocks fell off from the drilling surface in the form of cutting chips and formed pits under the action of drilling and impact load [25], as shown in Fig. (5).…”
Section: Brittle Fracture Removal Of Sic Ceramicmentioning
confidence: 99%