A thermal microactuator made by partial impregnation of polyimide with paraffin

Klintberg, Lena; Thornell, Greger

doi:10.1088/0960-1317/12/6/316

Cited by 10 publications

(6 citation statements)

References 12 publications

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“…Regarding the quality of the etched surfaces, cross sections (see figures [5][6][7][8][9] show that the wet etched funnel part was very smooth whereas the dry etched via was rougher. The close-up in figure 10 demonstrates a perhaps surprising texture consisting of a sharp vertical ripple stemming from poor discretization of the circles in the template used for lithography.…”

Section: Discussionmentioning

confidence: 99%

“…A particularly demanding case is the sealing of paraffin cavities-a challenge of growing concern as this substance has been used extensively for microactuation [1][2][3][4][5][6][7][8][9][10][11][12], for instance, in valves and pumps. Paraffin waxes exhibit a low surface energy and tend to wet most solids very well.…”

Section: Introductionmentioning

confidence: 99%

“…For prototyping and for moderately miniaturized components this is satisfactory, but besides efficiency (as with batch processing) and quality, process compatibility and the prospect of integration will suffer. Paraffin-filled actuators with paraffin being in direct contact with a fluid actuated [5][6][7], or those with cavities or diaphragms created by deposition of an elastic material on a defined volume and shape of paraffin in solid state [8][9][10][11][12], often termed as surface micromachined paraffin actuators, do not, of course, need any plugging.…”

Section: Introductionmentioning

confidence: 99%

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A solder sealing method for paraffin-filled microcavities

Nguyen¹,

Bejhed²,

Köhler³

et al. 2006

J. Micromech. Microeng.

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Abstract.Demonstrated and investigated here is a method to seal microfluidic systems by soldering. As a particularly difficult case of growing importance, the sealing of openings contaminated with paraffin wax was studied. Solder paste, screen printed on a metallized silicon, substrate was melted locally through application of 6.5 to 10 V to a 5 Ω copper film resistor for a few seconds and found able to drive an intermediate layer of paraffin away and seal a 0.2 mm diameter circular via by wetting to a surrounding copper pad. Although verified to be robust, the process did result in failing seals on excessive heating because of consumption of the pads. Correctly performed, the technique provided a seal at least withstanding a pressure of 8 bar for 8 h at 85ºC.

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Section: Discussionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

A solder sealing method for paraffin-filled microcavities

Nguyen¹,

Bejhed²,

Köhler³

et al. 2006

J. Micromech. Microeng.

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“…Several prototypes of minirobots exist that simulate the locomotion of the bugs, such as EMIL [14] realised by the Scuola Superiore S.Anna (SSSA) [15] or they adopted a legged locomotive mechanism for the endoscopic capsule [10][11]. Other research groups interested in polypedal locomotion tried to realize joints based on thermal shrinkage [16] or micro conveyers realized by arrayed polyimide joint actuators [17]; but devices based on these mechanisms resort to extremely complicated algorithms of motion control. Taking into account all these problems our attention was directed to employ the simpler system that nature offers us, which is senseless motion [18].…”

Section: Introductionmentioning

confidence: 99%

A New Bio‐Inspired Robot Based on Senseless Motion; Theoretical Study and Preliminary Technological Results

Cotroneo

Vozzi

Gerovasi

et al. 2008

Multi Modelg in Mat & Struct

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Over the last few years, there has been considerable interest in developing autonomous robots that are able to move in constrained environments, inspired by the motion of lower animal forms such as parasites, worms, insects and even snakes and eels. In this paper, we describe a new design and concept of autonomous microrobot based on senseless motion. The "senseless motion" is the movement in absence of an external perception system. In a lot of living species, rhythmic movements, finalized to locomotion, are produced by oscillating circuits in the central nervous system. We reproduced this motion using a voice-coil actuator embedded with its control hardware in a cylinder presents on its external surface a skate-like structure produces a differential friction in order to move the robot on different substrates. Preliminary experiments have been carried out on several materials in order to measure the frictional forces produced by the robot during its motion and to verify the repeatability of senseless motion.

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“…Thermal actuators based on paraffin were recently investigated. [5][6][7][8] As paraffin expands 10-15% upon melting, and solid and liquid paraffin are nearly incompressible, paraffin based microactuators offer large displacements and high actuation forces. In addition, paraffin offers other advantages.…”

mentioning

confidence: 99%

Synthesis and Characterization of Composite Coatings for Thermal Actuation

Malfliet

Deferme

Stappers

et al. 2007

J. Electrochem. Soc.

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The synthesis and thermal expansion of metal coatings containing phase change material ͑PCM͒ prepared by electrolytic deposition were investigated. Such a composite combines the thermomechanical properties of the PCM with the high thermal conductivity of the metal, and can be used as a thermal actuator material. This study used paraffin as the PCM and copper as the metal matrix. The paraffin was first microencapsulated by emulsion polymerization to obtain microcapsules with a diameter of 1-5 m containing 90 vol% paraffin to facilitate the incorporation of paraffin in copper by electrocodeposition. The microcapsules were added to a copper sulfate bath up to a concentration of 500 g/L. The electrocodeposition was performed at room temperature with a current density between 2 and 5 A dm −2 . These composites were examined by scanning electron microscopy, differential scanning calorimetry, and vertical dilatometry. Coatings with 40 vol % of microcapsules and a heat capacity of 12 kJ kg −1 during phase transformation were obtained. The thermal expansion of the composite showed a sharp increase in a small temperature range above the melting point. Although this behavior is ideal for thermal actuators, the effect decreased by thermal cycling. This remarkable thermomechanical behavior is explained by a thermoelastoplastic model for two-phase composites.

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A thermal microactuator made by partial impregnation of polyimide with paraffin

Cited by 10 publications

References 12 publications

A solder sealing method for paraffin-filled microcavities

A solder sealing method for paraffin-filled microcavities

A New Bio‐Inspired Robot Based on Senseless Motion; Theoretical Study and Preliminary Technological Results

Synthesis and Characterization of Composite Coatings for Thermal Actuation

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