A thin-film SnO2 sensor system for simultaneous detection of CO and NO2 with neural signal evaluation

Endres, H.-E.; Göttler, Wolfgang; Hartinger, R.; Drost, S.; Hellmich, W.; Müller, G.; Braunmühl, Ch.Bosch-v.; Krenkow, Angelika; Perego, C.; Sberveglieri, Giorgio

doi:10.1016/s0925-4005(97)80095-0

Cited by 55 publications

(17 citation statements)

References 6 publications

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“…CO and NO x ). [121] Furthermore, the sensor response (e.g. to NO 2 ) can be increased by optimizing the deposition temperature and thus the substrate surface coverage of Sn droplets.…”

Section: Spray Pyrolysismentioning

confidence: 99%

Semiconductor Gas Sensors: Dry Synthesis and Application

2010

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Since the development of the first chemoresistive metal oxide based gas sensors, transducers with innovative properties have been prepared by a variety of wet- and dry-deposition methods. Among these, direct assembly of nanostructured films from the gas phase promises simple fabrication and control and with the appropriate synthesis and deposition methods nm to μm thick films, can be prepared. Dense structures are achieved by tuning chemical or vapor deposition methods whereas particulate films are obtained by deposition of airborne, mono- or polydisperse, aggregated or agglomerated nanoparticles. Innovative materials in non-equilibrium or sub-stoichiometric states are captured by rapid cooling during their synthesis. This Review presents some of the most common chemical and vapor-deposition methods for the synthesis of semiconductor metal oxide based detectors for chemical gas sensors. In addition, the synthesis of highly porous films by novel aerosol methods is discussed. A direct comparison of structural and chemical properties with sensing performance is given.

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“…CO and NO x ). [121] Furthermore, the sensor response (e.g. to NO 2 ) can be increased by optimizing the deposition temperature and thus the substrate surface coverage of Sn droplets.…”

Section: Spray Pyrolysismentioning

confidence: 99%

Semiconductor Gas Sensors: Dry Synthesis and Application

2010

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“…Gas sensing is receiving increasing attention in industrial production, medical applications, and environmental monitoring [1][2][3][4][5]. A gas sensor's good performance is indicated by factors such as sensitivity, response time, energy consumption, long term monitoring, and reproducibility [4].…”

Section: Introductionmentioning

confidence: 99%

Gas sensing properties of indium–gallium–zinc–oxide gas sensors in different light intensity

Chen

Jiang

Chang

et al. 2015

Analytical Chemistry Research

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a b s t r a c tWe have successfully observed the change in indium-gallium-zinc-oxide (IGZO) gas sensor sensitivity by controlling the light emitting diode (LED) power under the same gas concentrations. The light intensity dependence of sensor properties is discussed. Different LED intensities obviously affected the gas sensor sensitivity, which decays with increasing LED intensity. High LED intensity decreases not only gas sensor sensitivity but also the response time (T 90 ), response time constant (s res ) and the absorption rate per second. Low intensity irradiated to sensor causes high sensitivity, but it needs larger response time. Similar results were also observed in other kinds of materials such as TiO 2 . According to the results, the sensing properties of gas sensors can be modulated by controlling the light intensity.

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“…[62] Die erhaltenen, relativ kleinen Körner und ihre gute Zugänglichkeit machen dieses Verfahren für die Synthese von Halbleitergassensoren für verschiedene Analyten wie CO und NO x interessant. [121] Die Sensorreaktion (z. B. auf NO 2 ) lässt sich durch die Optimierung der Abscheidungstemperatur, d. h. der Bedeckung der Substratoberfläche mit Sn-Tröpfchen, noch weiter steigern.…”

Section: Spraypyrolyseunclassified

Halbleitergassensoren: Trockensynthese und Anwendung

2010

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Seit der Entwicklung erster Chemiresistorgassensoren auf Metalloxidbasis wurden Wandler mit neuartigen Eigenschaften durch Nass‐ und Trockenabscheidung erzeugt. Der Direktaufbau nanostrukturierter Filme aus der Gasphase verspricht dabei eine einfache Herstellung und Steuerbarkeit, und mit geeigneten Synthese‐ und Abscheidungsmethoden können nm‐ bis μm‐dicke Filme hergestellt werden. Dichte Strukturen werden durch chemische oder Dampfabscheidungsverfahren unter kontrollierten Bedingungen erzeugt, Nanopartikelfilme durch Abscheidung mono‐ oder polydisperser, aggregierter oder agglomerierter Nanopartikel aus einem Gas. Durch schlagartiges Abkühlen während der Synthese lassen sich neuartige Materialien in Nichtgleichgewichts‐ oder substöchiometrischen Zuständen einfangen. Dieser Aufsatz beschreibt die gängigsten Verfahren für die Herstellung von Metalloxid‐Halbleiterdetektoren für chemische Gassensoren. Außerdem wird die Synthese hochporöser Filme mit neuentwickelten Aerosoltechniken diskutiert. Die chemischen und Struktureigenschaften werden der erhaltenen Sensorleistung gegenübergestellt.

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A thin-film SnO2 sensor system for simultaneous detection of CO and NO2 with neural signal evaluation

Cited by 55 publications

References 6 publications

Semiconductor Gas Sensors: Dry Synthesis and Application

Semiconductor Gas Sensors: Dry Synthesis and Application

Gas sensing properties of indium–gallium–zinc–oxide gas sensors in different light intensity

Halbleitergassensoren: Trockensynthese und Anwendung

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