A universal scanning-probe-microscope-based hybrid system

Abstract

A modularly equipped scanning probe microscope (SPM)-based hybrid system is developed, expanding application fields and performances of former instruments. The SPM head can easily be incorporated into the analysis chamber of most scanning electron microscopes (SEMs) and both systems can be handled by the electronics within one software simultaneously. Contact and non-contact scanning force microscope (SFM) measurements obtained inside an environmental SEM for the first time demonstrate resolutions of less than 0.2 nm under working conditions.Both probes can be used simultaneously either as actuators or sensors to deliberately modify and analyse sample properties as well as to characterize the probe interactions. This is the essential advantage of hybrid systems, besides the great number of well known complementary analyses which can be performed with each microscope at the same sample area. The use of an electron beam and a SFM tip as two independent electrical actuators and sensors is demonstrated to be exemplary. Interaction of the probes with each other is a new aspect, which is presented and discussed.

Recent advances in nanorobotic manipulation inside scanning electron microscopes

“…Piezoelectric actuators that are governed by the inverse piezoelectric effect overcome these challenges 47,48 and are capable of generating large forces in the kilo-Newton range with subnanometer positioning resolution and a high bandwidth 49 . A number of piezoelectric actuator-based nanomanipulators with multiple DOFs have been developed for precise positioning and manipulation of micro-and nanoscaled objects by companies (for example, Zyvex, Kleindiek, SmarAct, Toronto Nanoinstrumentation, and Attocube) and academia 33,41,42,[50][51][52][53][54] . The most common configuration of actuators for nanomanipulation is a coarse and fine positioner combination or a single actuator for both coarse and fine positioning.…”

“…Environmental scanning electron microscopes (ESEMs) overcome this limitation and permit the observation of liquid-phase materials, such as biological cells without metal coating and other electrically insulating materials that use a special secondary electron detector 86,154 . The first hybrid AFM/ESEM system was developed for accurate topography measurements and tip-sample interaction observations 52,155 . Although ESEM's imaging resolution is typically limited to a few nanometers, the integrated AFM achieved a resolution better than 0.2 nm in both contact mode AFM imaging and noncontact mode AFM imaging 52 .…”

“…The first hybrid AFM/ESEM system was developed for accurate topography measurements and tip-sample interaction observations 52,155 . Although ESEM's imaging resolution is typically limited to a few nanometers, the integrated AFM achieved a resolution better than 0.2 nm in both contact mode AFM imaging and noncontact mode AFM imaging 52 . The nanomanipulation system that was reported in Ref.…”

Integrating electron and near-field optics: dual vision for the nanoworld

“…In introducing a "universal SPM-based hybrid system" for incorporation into an SEM chamber in 2003, Joachimsthaler et al [4] review some of the earliest systems and point out the challenges of integration while maintaining optimum capability for both types of imaging. This is particularly true with respect to the working distance of the SEM, which plays a key role in obtaining optimum SEM imaging at high magnification.…”

Registration of AFM and SEM Scans Using Local Features

“…In this case, the SEM also helps to guide the AFM cantilever to the designated location. Some effort has been made towards the integration of an AFM inside the vacuum chamber of the SEM (Joachimsthaler et al 2003;Mick et al 2010), where the focus has been on the mechanical setup. In (Wortmann 2009) has been discussed under the viewpoint of visualization.…”