The subject of the PhD is focused on theoretical and experimental studies of nanoscale multi-gate Metal Oxide Semiconductor Field Effect Transistors (MOSFETs). The theoretical part is orientated towards the derivation of analytical expressions for the potential distribution within the channel of the transistors, from which characteristic parameters of the transistors like threshold voltage, subthreshold slope (SS) and Drain Induced Barrier Lowering (DIBL) are derived. The final aim of the work is to obtain analytical compact expressions for the drain current, valid in all regions of operation, i.e. from weak inversion to strong inversion in the below and above threshold voltage regions. First, symmetrical Double-Gate MOSFETs (DG MOSFETs) are studied, whereas the study of all other types of multi-gate MOSFETs (triple-gate and gate-all-around) is based on the derived model of DG MOSFETs.Different approaches produced various and interesting solutions for the different devices. For the experimental part, the transfer characteristics of single-FinFETs and 5-FinFETs were measured at room temperature. For analysis of the experimental data, numerical simulations were performed using the three-dimensional (3-D) SILVACO-ATLAS tools to verify the theoretical speculations and optimize the device performance.A simple analytical expression is derived for the potential distribution along the silicon channel of DG MOSFET in the weak inversion region. The model is compared and verified with the numerical solution of the two-dimensional Poisson's equation in terms of the geometrical characteristics of the transistor: the channel length (L), the silicon thickness (t Si ) and the gate oxide thickness (t ox ). It is found that the analytical expressions are effective even for channel lengths less than 30 nm, when the ratio of L/t Si is ≥ 2-3. Using the extra potential induced in the channel due to the Short-Channel Effects (SCE), a semi-analytical expression for the subthreshold drain current is derived, through which analytical expressions for the subthreshold slope, the drain-induced barrier lowering and the threshold voltage are obtained and discussed. Comparison of DG MOSFETs with silicon and germanium as channel materials, show that the use of germanium suppresses the SCEs.Using the simple analytical expression for the potential distribution, the transconductance to drain current ratio (g m /I d ) and the body factor (n) are derived for