A Way to Increase Q of FBARs Using Supporting Column

Qu, Yuanhang; Zou, Yang; Gao, Chao; Wen, Zhiwei; Liu, Wenjuan; Cai, Yao; Sun, Chengliang

doi:10.1109/ius52206.2021.9593819

Cited by 2 publications

(1 citation statement)

References 8 publications

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“…With the rapid development of wireless communication technology, fifth generation (5G) technology has led to the urgent requirement for greater bandwidth and higher frequency. 1,2) A laterally-excited bulk acoustic wave resonator (XBAR) based on lithium niobate (LiNbO 3 ) and lithium tantalate (LiTaO 3 ) have appeared recently. The piezoelectric coupling coefficient (K 2 ) of the XBAR can achieve 28% which is much higher than both surface acoustic wave (SAW) resonators and bulk acoustic wave (BAW) resonators, 3,4) due to the high mechanical and electrical energy conversion efficiency of LiNbO 3 and LiTaO 3 with high piezoelectric stress coefficient e 15 or e 24 .…”

Section: Introductionmentioning

confidence: 99%

Laterally-excited bulk acoustic wave resonator with an adjustable piezoelectric coupling coefficient

Wen

Xu²,

Liu³

et al. 2022

Jpn. J. Appl. Phys.

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This paper reports on a design journey for laterally-excited bulk acoustic wave resonator (XBAR) with adjustable piezoelectric coupling coefficient (K2). The vibration principle and resonant characteristics of XBAR are investigated by theoretical and simulation analysis, and the way to adjust K2 by introducing two grooves in the area between interdigital electrodes (IDEs) is proved to be effective by using finite element method (FEM) simulation and the Modified Butterworth-Van Dyke model with series capacitor Cr (MBVD-Cr) first, and then the impact of groove depth (Hg) and groove width (Wg) on K2 of XBAR is theoretically analyzed. Specifically, the K2 can be effectively adjusted by setting different values of Hg and Wg. After optimization, the maximum regulation range of K2 is from 2.02% to 45.05%. The fluted XBAR has a remarkable potential in building XBAR bandpass filter for specific frequency band, which greatly optimizes the XBAR filter design.

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