“…In addition, Parylene has low Young's modulus which grants large displacement in fabricated diaphragms with low applied pressure. Several Parylene diaphragm geometries have been investigated: flat [15]–[17], dome [18], corrugated [13], [15], [19], [20], and bellows [21], [22]. Among them, corrugated diaphragms and bellows provide the largest deflections (> 1 mm), possess low intrinsic stress, and thus are less likely to undergo plastic deformation compared to flat and dome diaphragms.…”