A zero TCF band 13 SAW duplexer

Wang, Yiliu; Solal, M.; Kook, T.; Briot, J.B.; Abbott, Ben; Chen, Alan; Daniel, Timothy D.; Malocha, Svetlana; Qin, K.; Steiner, K. G.

doi:10.1109/ultsym.2015.0092

Cited by 17 publications

(9 citation statements)

References 16 publications

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“…The outcome of these attempts is shown in Fig. 1, showing the performance boundaries of the best TCSAW [13], [26], [27], TCBAW [25], [28], and Lamb-waves devices [29]- [32] compared to our work (devices A and B) in this article. Note that in Fig.…”

mentioning

confidence: 72%

Near-Zero Drift and High Electromechanical Coupling Acoustic Resonators at > 3.5 GHz

Hassanien

Gong

2021

IEEE Trans. Microwave Theory Techn.

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In this article, near-zero drift and high electromechanical coupling acoustic resonators have been designed and demonstrated. The acoustic resonator is based on Lamb acoustic waves in a bimorph composed of lithium niobate on silicon dioxide. Our approach breaks through a performance boundary in conventional Lamb-wave resonators by introducing the bimorph while operating at higher order resonant modes. This enables the resonator to achieve frequency scalability, a low-temperature coefficient of frequency, and high electromechanical coupling altogether. The electromechanical coupling and temperature coefficient of the resonator were analytically optimized for the A 3 mode through adjusting the thicknesses of different materials in the bimorph. Resonators with different dimensions and stack thickness were fabricated and measured, resulting in a temperature coefficient of frequency ranging from −17.6 to −1.1 ppm/ • C, high electromechanical coupling ranging from 13.4% to 18%, and quality factors up to 800 at 3.5 GHz. The achieved specifications are adequate for fifth-generation (5G) sub-6-GHz frequency bands n77 and n78. Index Terms-Acoustic resonators, fifth generation (5G), lithium niobate on insulator (LNOI), low-temperature coefficient of frequency (TCF), microelectromechanical systems (MEMS), new radio (NR), piezoelectricity. I. INTRODUCTION T HE fifth-generation mobile network (5G) is a global wireless standard advancing the prevalent connectivity between people, machines, and devices [1], [2]. The third-generation partnership project (3GPP), a collective project partnership of mobile system manufacturers, has played a critical role in the development and deployment of the 5G standard [1]. Specifically, 5G new radio (NR) uses modulation schemes, waveforms, and access technologies, enabling increased data rates, coverage, reliability, capacity, and low latency [2]. 5G is driven by consumers and industrial trends, such as enhanced mobile broadband (eMBB), Internet of Things (IoT), smart vehicles, and healthcare/critical Manuscript

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confidence: 72%

Near-Zero Drift and High Electromechanical Coupling Acoustic Resonators at > 3.5 GHz

Hassanien

Gong

2021

IEEE Trans. Microwave Theory Techn.

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“…In 2015, Yiliu Wang et al adopted a piston-type modal sensor, which reduced the TCF by increasing the silicon oxide thickness, and designed a frequency band 13 duplexer, which was the first in the market to meet the NS07 suppression specification. 13 Band SAW Duplexer [ 46 ].…”

Section: Saw Filter Technologymentioning

confidence: 99%

Development and Application of SAW Filter

Chen

Zhu

2022

Micromachines

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With the in-depth advancement of the fifth generation (5G) mobile communication technology, the technical requirements for filters are also constantly improving. Surface acoustic wave (SAW) filters are widely used in home TV, mobile communications, radio frequency filters and radar due to their simple structure, few mask layers, easy miniaturization, and low cost. Through the continuous improvement of communication technology, SAW has developed into various high-performance acoustic filters from bulk SAW with the support of some new architectures, new materials and advanced modeling techniques. This paper analyzes and reviews the research situation of SAW filter technology.

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“…[1][2][3] Among them, temperature compensated SAW (TC-SAW) devices are developed and used as duplexers to satisfy narrow guard bandwidth requirements. [4][5][6][7][8][9][10][11][12][13] One example is those employing SiO 2 overcoated 128°YX-LiNbO 3 (SiO 2 /128-LN) structure. [6][7][8][9][10][11] Recently, Takai et al proposed use of a thin LiTaO 3 (LT) plate bonded to a support substrate, i.e.…”

Section: Introductionmentioning

confidence: 99%

“…[4][5][6][7][8][9][10][11][12][13] One example is those employing SiO 2 overcoated 128°YX-LiNbO 3 (SiO 2 /128-LN) structure. [6][7][8][9][10][11] Recently, Takai et al proposed use of a thin LiTaO 3 (LT) plate bonded to a support substrate, i.e. incredible high performance (I.H.P.)…”

Section: Introductionmentioning

confidence: 99%

Study of loss mechanisms in temperature compensated surface acoustic wave devices based on finite element method analysis using hierarchical cascading technique

Matsuoka

Omori

Hashimoto

2020

Jpn. J. Appl. Phys.

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This paper discusses loss mechanisms of temperature compensated surface acoustic wave (TC-SAW) devices using the SiO2 overcoated 128°YX-LiNbO3 (128-LN) substrate. Analysis is based on the finite element method (FEM) combined with the hierarchical cascading technique and the general purpose graphics processing unit. Three kinds of FEM model, i.e. 2.5D, three dimensional (3D) periodic and full 3D are analyzed without taking additional losses, i.e. material viscous loss, dielectric loss and electrode ohmic loss, and influence of scattering at structural discontinuities is evaluated solely. It is shown that although Q reduction is significant with an increase of the simulation dimension, in other words, that of the number of acoustic scattering mechanisms, estimated Q value is still considerably higher than reported values even for full 3D simulation. This result indicates that acoustic scattering at structural discontinuities is not a dominant loss mechanism in current TC-SAW devices employing the SiO2 overcoated 128-LN substrate.

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A zero TCF band 13 SAW duplexer

Cited by 17 publications

References 16 publications

Near-Zero Drift and High Electromechanical Coupling Acoustic Resonators at > 3.5 GHz

Near-Zero Drift and High Electromechanical Coupling Acoustic Resonators at > 3.5 GHz

Development and Application of SAW Filter

Study of loss mechanisms in temperature compensated surface acoustic wave devices based on finite element method analysis using hierarchical cascading technique

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