2001
DOI: 10.1016/s0257-8972(01)01141-0
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Abrasion resistant low friction diamond-like multilayers

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Cited by 35 publications
(12 citation statements)
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“…As shown in Table 1, W-containing films have a significant higher value of residual stress than unalloyed film (from 1.1 to w3 GPa), factor which is currently indicated in the literature on hard coatings as one of the most important on determining the hardness of the material [21,22].…”
Section: Mechanical Propertiesmentioning
confidence: 93%
“…As shown in Table 1, W-containing films have a significant higher value of residual stress than unalloyed film (from 1.1 to w3 GPa), factor which is currently indicated in the literature on hard coatings as one of the most important on determining the hardness of the material [21,22].…”
Section: Mechanical Propertiesmentioning
confidence: 93%
“…Such investigations were extended to a wide variety of elements such as Cr, Zr, Al, Si, etc. [26][27][28][29]. Particularly, Cr-based coatings exhibited the potential to be a good candidate for tribological applications, and in some cases demonstrated better wear resistance than Ti-based coatings [18,19].…”
Section: Materials and Designmentioning
confidence: 99%
“…Unfortunately, the high intrinsic compressive stress of ta-C films limits their practice applications, especially tribological applications. Many processes have been studied to reduce the intrinsic stress, such as incorporating doped elements [2,3], postdeposition thermal annealing [4] and multilayer structure designing [5]. However, the dopant atoms acting as impurities, and annealing leading to graphitization can decrease the hardness and wear resistance of the films [6,7].…”
Section: Introductionmentioning
confidence: 99%